为了提高诊断人眼对比敏感度性能,研制了变对比度、变频率、变亮度和四方位可控的计量校准级对比度阈值测试仪器.提出了可行的变对比度挡光板的移动以及变频率和四方位靶板组切换的优化控制设计方案.

Based on the test information from multi‐sample and multi‐mode instrument ,as well as the guide to expression of uncertainty in measurement (GUM ) and Monte Carlo method (MCM ) ,the four‐step interferometry measurement range and uncertainty of the infrared optic materials refractive index uniformity were discussed .Although the absolute sensitivity and ac‐curacy of infrared interferometry are lower than that of visible laser interferometer ,the four‐step interferometry can eliminate the inherent systematic errors of the interferometer and can help achieve high‐accuracy measurements of infrared optical refractive index homogeneity .The practical tests show that the measurement range can reach 1 × 10-5 ~5 × 10-3 and the relative standard uncertainty can reach 2 × 10-1 ~2 × 10-2 .

The image plane illumination nonuniformity caused by optical system or detector will affect the detection precision of photoelectric imaging system, especially in image guidance, positioning and recognition. An image plane illumination uniformity measurement device was set up, which was characteristiced of high uniformity and wide dynamic range. The device was composed of an asymmetric integrating sphere，the image collection and processing system, as well as the electrical control system.The asymmetric integrating sphere had two different radius,which was respectively 800mm and 1000mm.The spectral region was （0.4~1.1）μm, the illumination range was (1×10-4~2×104)lx. The image collection and processing system had two different acquisition card,which were respectively used for analog and digital signals. The software can process for dynamic image or static image. The TracePro software was used to make a internal ray tracing of integrating sphere, the illumination uniformity at the export was simulated for the size of 330mm×230mm and Φ 100mm export, the results were respectively 97.95% and 98.33%. Then,an illuminometer was used to measure the actual illumination uniformity of integrating sphere, the result was shown the actual illumination uniformity was 98.8%. Finally, a visible photoelectric imaging system was tested ,and three different uniformity indicators results were given.

基于对汉字使用频率及其空间频谱的分析,设计了一种数码相机像质评测用的汉字靶板.通过对37台不同型号数码相机的空间频率响应(SFR)、主观质量因子(SQF)及汉字靶板测试结果的统计分析,获得了最小可识别汉字磅值分别与SFR、SQF之间的经验公式.另抽取10台数码相机验证,结果显示调制传递函数测试法获得的SFR、SQF值均落在汉字靶板测试法获得SFR、SQF的95％的置信区间内.这种汉字靶板测试法类似于判读视力表的方式,简化了测试设备,操作方法也简单.

为满足野外检测多波段光电设备光轴平行性的检校需求,研制了一套便携式多光轴平行性检校系统.系统采用反射式卡塞格林光学系统和ZnS晶体靶板,为被校系统提供无穷远的十字分划目标并以此作为瞄准基准,完成对被校系统电视轴和红外轴之间的平行性检校；采用CCD系统完成分划板十字线和靶纸上激光光斑的采集,并利用数据处理系统检测出分划板十字中心与激光光斑中心位置的偏差量,完成对被校系统激光光轴与可见光轴之间的平行性检校.利用高精度光学角规对所研制的检校系统进行了标定,精度可达亚秒级.实验结果表明,该检校系统测量电视轴与红外轴之间平行性标准不确定度为2″,检校激光瞄准轴与发射轴平行性标准不确定度为5″.

With the development of the charged coupled device(CCD),complementary metal oxide semiconductor(CMOS),digital image processing and electronic components,the image quality of the digital camera has also developed a lot in the past ten years.The decline of the machining cost makes electro-optical imaging system used extensively in all kinds of fields,so the test and evaluation of the imaging capacity of the imaging system are also paid a lot attention.Digital camera(DC) can put out the digital image which can be identified and automaticly processed by the computer,and make it possible that the image quality of the digital camera can be evaluated objectively.Based on the DC standards,this paper studies methods of the objective evaluation and calculation of the DC parameters.Finishing the evaluation of single parameters,this paper makes a integrated grade from the DC using attribute math.

In modern information warfare,the testing technology is very important to the development,use and maintenance of the optoelectronic reconnaissance and tracking pointing equipment.The development status of optoelectronic reconnaissance and tracking pointing equipment testing technology at home and broad was discussed from four aspects.At present,the comprehensive digital measurement of visible light and low light level imaging performance parameters has been achieved.The measurement uncertainty of image surface uniformity and distortion calibration performance parameters achieves 1% and 0.2% respectively,the infrared thermal imaging system performance parameters such as minimum resolvable temperature difference(MRTD) have began to be measured by the means of objective evaluation,the maximum range allowable measuring error limit of laser ranging system performance parameters such as maximum range is less than 1%.In addition,the measurement uncertainty of the multi-axis consistency can achieve 2″.Our future research in this field will be focused on the development of a variety of calibration means which run fast and accurately and the promotion of the shimmering,white,infrared and ultraviolet optoelectronic imaging testing technology,as well as establishing and improving appropriate testing standards and securing systems.

设计了一种新颖的双回转子孔径扫描装置,得到了可以覆盖大口径光学系统全口径的子孔径扫描光斑,从而满足了大口径光学系统光谱透射特性的测试需求.结合双回转扫描装置的结构参数误差,基于齐次坐标变换矩阵原理,建立了双回转扫描装置的数学模型,提出了一套分析子孔径扫描精度的方法,并且在设计双回转子孔径扫描装置中实现了应用.分析结果表明,当双回转子孔径扫描装置的回转半径ηr≤400 mm时,子孔径扫描精度△ηr为-0.007～0.028 mm.提出的子孔径扫描误差估计方法、建立的扫描运动坐标转换模型和得到的误差数据结果可作为类似回转扫描机构的设计参考,也为基于双回转子孔径扫描方法的大口径光学系统光谱透射特性测试的深入研究提供了理论依据和数据基础.

To meet the pre-launch radiometric calibration requirements of large field of view (FOV) imaging remote sensors, a large-area integrating sphere uniform radiation source (ISURS) based on a 1600mm diameter internally illuminated integrating sphere with a 620mm diameter exit port was designed. The software TracePro based on ray-tracing method was applied to computer modeling of the ISURS. It is shown that the angle of internal radiation source from the center of the sphere is an important factor affecting the spatial radiance uniformity at exit port. Taking this factor into account, the model established is able to obtain the important characteristics of the sphere source. With the characteristics obtained, the ISURS was manufactured and its optical parameters were measured. The measurement result of the spatial radiance uniformity of the large-area ISURS was 99.19%. There is a discrepancy of 0.12% between measured and simulated results. It is demonstrated that the method used and the model established can increase the efficiency of designing large-area sphere radiation source.

A new laser differential confocal radius measurement (DCRM) is proposed for high precision measurement of radius. Based on the property of an axial intensity curve that the absolute zero precisely corresponds to the focus of the objective in a differential confocal system (DCS), DCRM uses the zero point of the DCS axial intensity curve to precisely identify the cat's-eye and confocal positions of the test lens, and measures the accurate distance between the two positions to achieve the high-precision measurement of radius of curvature (ROC). In comparison with the existing measurement methods, DCRM proposed has a high measurement precision, a strong environmental anti-interference capability and a low cost. The theoretical analyses and preliminary experimental results indicate that DCRM has a relative measurement error of better than 5 ppm.

点探测器的位置是决定双轴共焦显微技术层析能力的关键因素之一,理想的共焦显微成像系统要求点探测器放在光轴上并且没有离焦情况出现.通过理论和实验分析了点探测器偏离理想位置对双轴共焦显微技术的轴向响应特性造成的影响.结果表明,点探测器的微小轴向偏移对轴向响应特性造成的影响基本可以忽略,但点探测器的微小横向偏移会使轴向响应曲线沿着z轴方向产生一定的移动,移动量随着偏移量的增大而增大.

In comparison with the conventional confocal microscopy,dual-axes confocal microscopy can use a low NA objective to achieve a high resolution,a large work distance and high S/N,due to the special dual-axes structure.The spatial resolution of a dual-axes confocal microscopy with virtual pinhole CCD is analyzed in theory and its corresponding experimental setup is established,and the axial response experiments are done using the established experimental setup.The full width at half a maxim(FWHM)in the axial direction is 2.63μm achieved by using an illuminating lens of NAi=0.117,a collecting lens of NAc=0.106 and θ=45°.And it is about 20 times higher than the axial FWHM of conventional confocal microscopy with the same parameters.

For measuring large-aperture optical system transmittance, a novel sub-aperture scanning machine with double-rotating arms (SSMDA) was designed to obtain sub-aperture beam spot. Optical system full-aperture transmittance measurements can be achieved by applying sub-aperture beam spot scanning technology. The mathematical model of the SSMDA based on a homogeneous coordinate transformation matrix is established to develop a detailed methodology for analyzing the beam spot scanning errors. The error analysis methodology considers two fundamental sources of scanning errors, namely (1) the length systematic errors and (2) the rotational systematic errors. As the systematic errors of the parameters are given beforehand, computational results of scanning errors are between -0.007 similar to 0.028mm while scanning radius is not lager than 400.000mm. The results offer theoretical and data basis to the research on transmission characteristics of large optical system.

In order to achieve the precise measurement of the lenses axial space, a new lenses axial space ray tracing measurement (ASRTM) is proposed based on the geometrical theory of optical image. For an assembled lenses with the given radius of curvature r(n) and refractive index nn of every lens, ASRTM uses the annular laser differential confocal chromatography focusing technique (ADCFT) to achieve the precise focusing at the vertex position P(n) of its inner-and-outer spherical surface Sn and obtain the coordinate z(n) corresponding to the axial movement position of ASRTM objective, and then, uses the ray tracing facet iterative algorithm to precisely determine the vertex position P(n) of every spherical surface by these coordinates z(n), refractive index n(n) and spherical radius r(n), and thereby obtaining the lenses inner axial space d(n). The preliminary experimental results indicate that ASRTM has a relative measurement error of less than 0.02%.

非共轴激光共焦显微技术是近年来激光共焦显微成像领域发展起来的一种新型成像方法.该成像方法将被测样品与照明光轴成一定角度放置,使得照明光轴与采集光轴形成一定的夹角,减小系统合成焦体体积、提高轴向分辨力.与传统的共焦显微技术相比,该方法可以有效兼顾激光共焦显微系统的轴向分辨力、工作距和视场大小.介绍了非共轴激光共焦显微技术的成像原理,详述了共焦theta显微技术和双轴共焦显微技术这两种典型的非共轴激光共焦显微技术的研究现状和发展趋势,简述了在双轴共焦显微技术领域的研究设想.

A fast signal-to-noise ratio (SNR) digital test method for a CCD camera is presented in this study. The proposed method employs the conventionally used differential operations of two sequential images to determine the noise. However, the technique focuses on two features to improve the SNR evaluation: the noise is separated from the differential image by a specially designed digital high-pass filter that does not affect the noise intensity; and the additional quantization noise introduced into the digital image by the frame grabber is corrected for in the final calculation. The method can produce an objective measurement that offers high repeatability. The results obtained are consistent with those produced by industry standard instruments.

Critical dimension measurement based on scatterometry is expected to be the key technology in current and future semiconductor manufacturing processes. Scatterometry has strong dependence on modeling. The paper compares the Integral Equation Solver and the Rigorous Coupled Waveguide Analysis (RCWA) technique from convergence, and chooses the RCWA method to simulate the critical dimension measurement. The paper introduces an angle resolved scatterometry technology constructed on microscope. The back focal plane of a bright field reflection microscope contains diffraction information about the sample, and positions in the back focal plane map to diffraction angles from the sample. With suitable control of the angle of the incident illumination, back focal plane imaging can provide information similar to that obtained from angle resolved scatterometry. The paper simulates the reflectance of the rectangular grating at a fixed wavelength (lambda=532nm) versus angle of incidence, measured for both s polarization and p polarization. The silicon gratings are 10nm difference with line width, pitch, line height and sidewall angle. The simulations reveal that the p polarization light is more sensitive than the s polarization light to the changes of the grating size, and the scatterfield microscopy has nanometer level sensitivity to the line width variations.

Confocal measurement system is recently widely used as important tools for measurement of three-dimensional microstructures and surface contours because of its good 3D chromatographic imaging capability. And superresolution pupil filter is often used for improving the resolution of confocal measurement system because of its easy structure, thereby satisfying the measurement requirement of ultra-precision microstructures for higher spatial resolution. Because the pupil filter improves the resolution by changing the amplitude and phase distribution of light beam, the position of pupil filter has an important effect on the resolution. In this paper, the measurement model of confocal measurement system is established for different position of pupil filter, and based on these models; the resolution properties are analyzed by emulation to confirm the best position of pupil filter in the measurement system. And the optimized phase-only filter is combined with a confocal measurement system to improve the lateral resolution and the test setup is established. In order to verify the validation of the above theory, the standard step is measured using the established setup when the pupil filter is at different position. Preliminary experiments and analyses indicate the system using a phase-only filter at different positions can achieve different resolutions.The confirmation of the best position of the pupil filter can provide effective theory approach for optical system design, and more effectively improve the measurement capability.

spectral longitudinal mode character of short coherence solid laser is analyzed with complex coherence degree.The relation between optical path difference and complex coherence degree with multi-longitudinal modes is deduced.Comparing narrow line width laser and normal wider line solid laser in simulation, the complex coherence degree of solid laser decreases more quickly with wider line width and more longitudinal modes.An experimental short coherence solid laser for interferometry is built.The coherence length is measured.The result is in agreement with the foregoing analysis.

A device of optical tweezers array based on double-plate shearing interference and its application to separating polystyrene particles are studied. The technique is hopeful to be a novel method of particle separation, such as cells. Firstly, the classical optical tweezers theory is modified to set up theoretical model of optical tweezers array system. The parameters of the model are discussed and simulated by Matlab software to provide the theoretical foundation for the following device design. And an optical tweezers array is set up based on the parameters. With adjusting the angle between two interference fields, a two-dimensional optical tweezers array which has different distribution characters can be obtained. By applying the system to particle trapping, 6μm polystyrene particles are trapped successfully, which proves the rationality and feasibility of the design.