The idea is to present the results of production methods of nanoelectronics materials and structures and nanosystems technique based on the cluster type automatic platform NANOFAB NTK-9. Experimental research of microand nanofluidics systems using focused ion beam milling. Milling of microlenses structures. Vanadium and Zinc oxide thin film deposition and their properties researching. Growing aligned arrays of hybrid carbon nanostructures.
