Chemical anodization and voltage contrast scanning electron microscopy (VC-SEM) have been used to identify electrically faulty structures in a bipolar test array. Direct comparison of these techniques was achieved by examining the same emitters with each method. VC-SEM is shown to be a useful technique for delineating E-C shorts because of its nondestructive and purely electrical nature. Further investigations by transmission electron microscopy revealed dislocations in many short-circuited emitters and occasionally in unshorted devices. This confirmed prior observations that crystallographic defects in silicon devices may sometimes be, but are not always, electrically active.
We report on the microstructural analyses of chemically prepared Pb(Zr0.53Ti0.47)O3 (PZT 53/47) films. Although several techniques were used to analyze films, transmission electron microscopy (TEM) was emphasized. Phase evolution of these films, fabricated using hybrid metallo-organic decomposition (HMD), was determined by processing films at temperatures ranging from 500 °C to 650 °C. Our films, when observed with an optical microscope, appeared to consist of two distinct phases: (1) a featureless matrix and (2) 1–2 μm diameter “rosettes”. PZT films fired at 500 °C consisted of a pyrochlore containing phase (featureless matrix) and contained no perovskite, whereas films fired at 600 °C were ferroelectric and were approximately 90% perovskite (rosettes) by volume. Our TEM analysis showed that the pyrochlore-containing phase consisted of interpenetrating nanocrystalline pyrochlore and amorphous phases, both with dimensions on the order of 5 nm. For PZT films processed at 650 °C, the perovskite phase was observed in two forms: (1) large (≍2 μm) rosette structures containing 30 nm pores and (2) dense equiaxed particles on the order of 100 nm. We propose that phase evolution—with increasing temperature of HMD PZT 53/47 films—consists of the following steps: (1) phase separation, probably occurring in solution, (2) pyrochlore crystallization, (3) heterogeneous nucleation of perovskite PZT, and (4) homogeneous nucleation of perovskite PZT.
The microstructures of YBa2Cu3O7−x thin films deposited by laser ablation on single crystal (001) LaAlO3 substrates have been investigated. The orientation of the YBa2Cu3O7−x layer next to the interface is found to be completely c-perpendicular, with a high degree of epitaxy between the film and the substrate. Misfit dislocations, with a periodic spacing of around 13 nm, are present at the interface. Two distinct interfacial structures are seen in these films. At a film thickness of around 400 nm, nucleation of c-parallel grains occurs, leading to a switchover from a c, and, and-perpendicular to a c-parallel microstructure. Amorphous particulates, ejected from the target during processing, lead to the formation of misoriented grains, giving rise to high-angle grain boundaries in the film.
Thick film (1.2 μm) YBCO superconductors grown by pulsed laser deposition on unbuffered and CeO2-buffered single crystal (001)-oriented yttria-stabilized zirconia (YSZ) substrates have been investigated. YBCO and YSZ react to form BaZrO3 (BZO), whereas YBCO and CeO2 react to form BaCeO3. Reaction phases were examined by θ-2θ and four-circle x-ray diffraction and high resolution electron microscopy. Three orientation relationships identified for the unbuffered films were (i) (001)YBCO ‖ (011)BZO ‖ (001)YSZ with [110]YBCO ‖ [100]BZO ‖ [100]YSZ, (ii) (001)YBCO ‖ (001)BZO ‖ (001)YSZ with [110]YBCO ‖ [100]BZO ‖ [100]YSZ, and (iii) (001)YBCO ‖ (001)BZO ‖ (001)YSZ with [100]YBCO ‖ [100]BZO ‖ [100]YSZ. The results suggest that for films grown at typical deposition temperatures, YBCO epitaxy is established before the interfacial reaction occurs. The presence of BaCeO3 in buffered films grown at high temperatures (790 °C) was confirmed by θ-2θ scans and selected area diffraction patterns.
YBa2Cu3O7-x (123) powders containing silver have been prepared by aerosol decomposition. Metal nitrate solution droplets were decomposed at temperatures above and below the melting point of the Ag-O eutectic. In both cases, the Ag was present as a separate grain attached to YBa2Cu3O7-x. Individual aerosol particles had dimensions of 50 – 1000 nm. Grain sizes of Ag and 123 crystallites within these particles were 10 to 100 nm. Larger 123 grain sizes could be obtained by varying the reactor operating conditions. The powders provide a source of material for generation of YBa2Cu3O7-x/Ag ceramics with smaller Ag and 123 grain sizes and more uniform composition than can be obtained by other methods.
Interfacial precipitation in sol-gel derived, titania-doped diphasic mullite gels was investigated using conventional and high resolution transmission electron microscopy. Rutile, anatase, and brookite precipitated on the interface between {110} planes of mullite and glass pockets in the sintered body. The formation of brookite may be attributable to the Si- and Al-rich environment during precipitation. Each polymorph of titania has a unique morphology and orientation relationship with mullite. Brookite exhibits a truncated pill box shape, and anatase displays a vermicular morphology. Quenching experiments suggest that the precipitates grow and undergo phase transformations during cooling.
: This document is a supplement to the President's 2008 Budget Request submitted to Congress on February 5, 2007. It gives a description of the activities underway in 2007 and planned for 2008 by the Federal Government agencies participating in the National Nanotechnology Initiative (NNI), primarily from a programmatic and budgetary perspective. It is based on the NNI Strategic Plan released in December 2004 and reports estimated investments for 2007 and requested investments for 2008 by program component area (PCA), as called for under the provisions of the 21st Century Nanotechnology Research and Development Act (Public Law 108-153).
Microstructural changes caused by doping α-Al2O3 with small amounts of SiO2 and TiO2 added singly or together were investigated. When they were sintered at 1450°C for 120 min, singly doped samples developed equiaxed microstructures, but codoped material developed an anisotropic microstructure that contained platelike grains with an average aspect ratio of 3.4. The development of anisotropy thus resulted from a cooperative effect of silicon and titanium. Amorphous material was present at most grain boundaries in the silicon-doped sample. In the codoped sample, only boundaries that exhibited a basal facet were penetrated by amorphous material. Energy dispersive X-ray spectroscopy analysis showed strong titanium enrichment at the edges of platelets. Additional experiments demonstrated that the volume fraction of highly anisotropic platelike grains interspersed with equiaxed grains could be adjusted by using varying amounts of titanium with a constant amount of silicon content. The fracture toughnesses of such materials increased as the structure became more anisotropic.
The fabrication of semiconductor nanowires, in which composition, size and conductivity can be controlled in both the radial and axial direction of the wire is of interest for fundamental studies of carrier confinement as well as nanoscale device development. In this study, group IV semiconductor nanowires, including Si, Ge and SixGe1-x alloy nanowires were fabricated by vapor-liquid-solid (VLS) growth using gaseous precursors. In the VLS process, gold is used to form a liquid alloy with Si and Ge which, upon supersaturation, precipitates a semiconductor nanowire. Nanoporous alumina membranes were used as templates for the VLS growth process, in order to control the diameter of the nanowires over the range from 45 nm to 200 nm. Intentional p-type and n-type doping was achieved through the addition of either trimethylboron, diborane or phosphine gas during nanowire growth. The electrical properties of undoped and intentionally doped silicon nanowires were characterized using field-assisted assembly to align and position the wires onto pre-patterned test bed structures. The depletion characteristics of back-gated nanowire structures were used to determine conductivity type and qualitatively compare dopant concentration. SiGe and SiGe/Si axial heterostructure nanowires were also prepared through the addition of germane gas during VLS growth. The Ge concentration in the wires was controllable over the range from 12 % to 25% by varying the inlet GeH4/SiH4 ratio.
The atomic structure of the film–substrate interface of a (001) Sr2RuO4/(100)c LaAlO3 film, determined by high-resolution transmission electron microscopy and simulation, is reported. The structure of superconductivity-quenching Δc≈0.25 nm out-of-phase boundaries (OPBs) in the film is also reported. Growth in one region on the La-terminated surface is observed to nucleate with a SrO layer. Because two structurally equivalent SrO layers exist within the unit cell, two neighboring nuclei with differing growth order (SrO-RuO2-SrO or RuO2-SrO-SrO) will nucleate an OPB where their misaligned growth fronts meet. Strategies to avoid OPB generation by this mechanism are suggested, which it is hoped may ultimately lead to superconducting Sr2RuO4 films.
The volatility of bismuth and bismuth oxide species complicates the growth of phase-pure films of SrBi2Nb2O9 and SrBi2Ta2O9. Films that appear phase-pure by x-ray diffraction can have microstructural defects caused by transient bismuth nonstoichiometry which have a significant impact on properties. Such defects are resolved by transmission electron microscopy. Post-growth loss of bismuth from a slowly cooled SrBi2Ta2O9 film resulted in the generation of a high density of out-of-phase boundaries (OPBs), which are demonstrated to be ferroelectrically inactive. In another film, the difference in the rate of desorption of bismuth oxides from SrTiO3 versus that from SrBi2Nb2O9 led to bismuth enrichment at the film–substrate interface, and the formation of an epitaxial reaction layer in an otherwise stoichiometric SrBi2Nb2O9 film. This different-composition layer would be expected to alter the electrical properties of the film as a whole. These results help explain the scatter in electrical data reported for similarly oriented films.
The synthesis of Si nanowires in nanoporous anodic alumina membranes was demonstrated using a combination of Au electrodeposition and vapor–liquid–solid growth at 500 °C using SiH4 as the Si source. The average diameter of the nanowires was 200±54 nm which was close to the pore size distribution of the membranes. High-resolution transmission electron microscopy revealed that the nanowires consist of a crystalline Si core, oriented in the 〈100〉 or 〈211〉 growth direction, with a thin (<3 nm) native oxide coating. In this process, Au terminates both ends of the growing wires, resulting in the formation of Au–Si–Au nanowires.
Interfacial morphology and reaction products in thermal barrier coating systems were investigated by scanning and transmission electron microscopy (SEM and TEM). The samples consist of yttria-stabilized zirconia (YSZ; 6–8 wt.% yttria) deposited by air plasma spraying onto either of two types of bond coats: a layer consisting of Ni–15.9Cr–5.3Al–0.6Y with 5 wt.% of alumina particulate added, or one that was only the base Ni–Cr–Al–Y composition. In samples thermally cycled to failure in a burner rig, numerous interfacial protrusions of several microns or more in size are observed. These have a complex microstructure and contain elemental Ni intermixed with Ni(Al,Cr)2O4 spinel, (Al,Cr)2O3, and other oxides. Unlike some prior studies, nickel oxide (NiO) was not detected. Protrusion microstructures were similar for the two bond coat systems, but interfacial protrusions for the case of the base composition (i.e. no added alumina particulate) did not contain any spinel phase. Comparison of cross-sectional samples before and after oxidation indicates that the protrusions arise from the encapsulation of isolated segments of the bond coat. The intermixing of metallic Ni grains with oxides in the reaction zone may contribute to failure by affecting local stresses during thermal cycling.
Below the critical potential, E-c, selective dissolution of Cu from Cu-18 atom % Au proceeds via Cu transport through an essentially planar Au-rich product layer, which over time increases to hundreds of atom layers in thickness. Transmission electron micrographs (TEM) taken after the selective dissolution (at E < E-c) and subsequent (current-off) back alloying processes reveal nearly uniform Moire patterns characteristic of the superposition of two layers with similar crystal structures, i.e., the Cu-depleted (Au-rich) product layer and the parent alloy. The Moire fringe spacing decreases with the time of Cu dissolution (for similar to 60 s), indicating solid-solution Au enrichment in the product layer during dissolution. The Moire patterns give no indication of discrete islands of residual Au. The decreasing Cu dissolution rate follows the parabolic law for the first 60 s with an effective diffusivity of Cu in the product layer of similar to 10(-13) cm(-2) s(-1) at 23 degrees C. The TEMs also show a few pits, whose diameter is in the <10 nm range and whose number increases with time, which may account for the higher rate of Cu dissolution (than given by the parabolic law) after 1 min. (C) 2001 The Electrochemical Society.
Epitaxial Sr2RuO4 thin films grown by pulsed-laser deposition from high-purity (99.98%) Sr2RuO4 targets on (001) LaAlO3 were found to be not superconducting down to 0.4 K. Structural disorder is believed to be responsible. A correlation was observed between higher resistivity ratios in electrical transport measurements and narrower x-ray diffraction rocking curve widths of the Sr2RuO4 films. High-resolution transmission electron microscopy revealed that the dominant structural defects, i.e., the defects leading to the observed variation in rocking curve widths in the films, are {011} planar defects, with a spacing comparable to the in-plane superconducting coherence length of Sr2RuO4. These results imply that minimizing structural disorder is the key remaining challenge to achieving superconducting Sr2RuO4 films.
SrBi2Nb2O9 (and in some cases SrBi(2)TazO(9)) epitaxial thin films were deposited on (001). (110), and (111) SrTiO3 substrates by pulsed laser deposition (PLD), both with and without epitaxial SrRuO3 bottom electrodes. Films grow epitaxially with the c-axis inclined by Oo, 45 degrees, and 57 degrees from the substrate surface normal, respectively. Greater tilts of the c-axis into the plane of the substrate surface provide a greater component of the polar axis (the a-axis of the orthorhombic unit cell)perpendicular to the substrate surface, leading to increased remanent polarization (P-r) values. Portions of the same films used for electrical characterization were examined by transmission electron microscopy (TEM). Films have a single c-axis tilt angle and are fully crystalline with no observable second-phase inclusions. All films are observed to have a high density of out-of-phase boundaries (OPBs).