Single electron Sensitive Read Out (SiSeRO) is a novel on-chip charge detection technology that can, in principle, provide significantly greater responsivity and improved noise performance than traditional charge coupled device (CCD) readout circuitry. The SiSeRO, developed by MIT Lincoln Laboratory, uses a p-MOSFET transistor with a depleted back-gate region under the transistor channel; as charge is transferred into the back gate region, the transistor current is modulated. With our first generation SiSeRO devices, we previously achieved a responsivity of around 800 pA per electron, an equivalent noise charge (ENC) of 4.5 electrons root mean square (RMS), and a full width at half maximum (FWHM) spectral resolution of 130 eV at 5.9 keV, at a readout speed of 625 Kpixel/s and for a detector temperature of 250 K. Importantly, since the charge signal remains unaffected by the SiSeRO readout process, we have also been able to implement Repetitive Non-Destructive Readout (RNDR), achieving an improved ENC performance. In this paper, we demonstrate sub-electron noise sensitivity with these devices, utilizing an enhanced test setup optimized for RNDR measurements, with excellent temperature control, improved readout circuitry, and advanced digital filtering techniques. We are currently fabricating new SiSeRO detectors with more sensitive and RNDR-optimized amplifier designs, which will help mature the SiSeRO technology in the future and eventually lead to the pathway to develop active pixel sensor (APS) arrays using sensitive SiSeRO amplifiers on each pixel. Active pixel devices with sub-electron sensitivity and fast readout present an exciting option for next generation, large area astronomical X-ray telescopes requiring fast, low-noise megapixel imagers.

Future mega-pixel imaging X-ray detectors will require excellent spectral response at soft (E < 1 keV) X-ray energies while operating at fast frame-rates. We have characterized the sub-keV spectral resolution of two low-noise MIT Lincoln Laboratory CCDs in detail. These devices are identical in format but differ in gate structure and output stage design. We report measurements of the shape of the spectral redistribution function as a function of energy for each of these sensor types and compare our measurements with theoretical expectations. We also assess the implications of the observed response functions for scientific performance in deep X-ray imaging and high-resolution spectroscopy applications.

We introduce a new output amplifier for fully-depleted thick p-channel CCDs based on double-gate MOSFETs. The charge amplifier is an n-type MOSFET specifically designed and operated to couple the fully-depleted CCD with high charge-transfer efficiency. The junction coupling between the CCD and MOSFET channels has enabled high sensitivity, demonstrating sub-electron readout noise in one pixel charge measurement. We have also demonstrated the non-destructive readout capability of the device. Achieving single-electron and single-photon per pixel counting in the entire CCD pixel array has been made possible through the averaging of a small number of samples. We have demonstrated fully-depleted CCD readout with better performance than the floating diffusion and floating gate amplifiers available today, in both single and multisampling regimes, boasting at least six times the speed of floating gate amplifiers.

We demonstrate so-called repetitive non-destructive readout (RNDR) for the first time on a Single electron Sensitive Readout (SiSeRO) device. SiSeRO is a novel on-chip charge detector output stage for charge-coupled device (CCD) image sensors, developed at MIT Lincoln Laboratory. This technology uses a p-MOSFET transistor with a depleted internal gate beneath the transistor channel. The transistor source-drain current is modulated by the transfer of charge into the internal gate. RNDR was realized by transferring the signal charge non-destructively between the internal gate and the summing well (SW), which is the last serial register. The advantage of the non-destructive charge transfer is that the signal charge for each pixel can be measured at the end of each transfer cycle and by averaging for a large number of measurements ($\mathrm{N_{cycle}}$), the total noise can be reduced by a factor of 1/$\mathrm{\sqrt{N_{cycle}}}$. In our experiments with a prototype SiSeRO device, we implemented nine ($\mathrm{N_{cycle}}$ = 9) RNDR cycles, achieving around 2 electron readout noise (equivalent noise charge or ENC) with spectral resolution close to the fano limit for silicon at 5.9 keV. These first results are extremely encouraging, demonstrating successful implementation of the RNDR technique in SiSeROs. They also lay foundation for future experiments with more optimized test stands (better temperature control, larger number of RNDR cycles, RNDR-optimized SiSeRO devices) which should be capable of achieving sub-electron noise sensitivities. This new device class presents an exciting technology for next generation astronomical X-ray telescopes requiring very low-noise spectroscopic imagers. The sub-electron sensitivity also adds the capability to conduct in-situ absolute calibration, enabling unprecedented characterization of the low energy instrument response.

The Single electron Sensitive Read Out (SiSeRO) is a novel on-chip charge detector output stage for charge-coupled device (CCD) image sensors. Developed at MIT Lincoln Laboratory, this technology uses a p-MOSFET transistor with a depleted internal gate beneath the transistor channel. The transistor source-drain current is modulated by the transfer of charge into the internal gate. At Stanford, we have developed a readout module based on the drain current of the on-chip transistor to characterize the device. In our earlier work, we characterized a number of first prototype SiSeROs with the MOSFET transistor channels at the surface layer. An equivalent noise charge (ENC) of around 15 electrons root mean square (RMS) was obtained. In this work, we examine the first buried-channel SiSeRO. We have achieved substantially improved noise performance of around 4.5 electrons root mean square (RMS) and a full width half maximum (FWHM) energy resolution of 132 eV at 5.9 keV, for a readout speed of 625 kpixel/s. We also discuss how digital filtering techniques can be used to further improve the SiSeRO noise performance. Additional measurements and device simulations will be essential to further mature the SiSeRO technology. This new device class presents an exciting new technology for the next-generation astronomical X-ray telescopes requiring fast, low-noise, radiation-hard megapixel imagers with moderate spectroscopic resolution.

Several applications with charge-coupled devices (CCDs) and Skipper-CCDs can be significantly improved with an enhancement in pixel readout speed. In this work, we present the design and TCAD modeling of a highly sensitive double-gate MOSFET for charge amplification in CCD detectors. The design steps followed to integrate the device into high-voltage fully-depleted thick CCDs are described. Like Skipper-CCDs, the device allows for nondestructive readout of the charge packet for noise reduction. The simulations predict a sensitivity of $2.5\,\,\text {nA}/\text {e}^{-}$ and a readout noise of $2.4\,\,\text {e}^{-}_{\text {rms}}/\text {pix}$ at a readout speed of $300 \text {kpixels/s}$ . In a multisampling operation, a readout noise of $0.1\,\,\text {e}^{-}_{\text {rms}}/\text {pix}$ can also be achieved at a readout speed in the order of $700 \text {pixels/s}$ , approximately seven times faster than the Skipper-CCD at that same readout noise level.

We present an evaluation of a novel on-chip charge detector, called the Single electron Sensitive Read Out (SiSeRO), for charge-coupled device (CCD) image sensor applications. It uses a p-MOSFET transistor at the output stage with a depleted internal gate beneath the p-MOSFET. Charge transferred to the internal gate modulates the source-drain current of the transistor. We have developed a drain current readout module to characterize the detector. The prototype sensor achieves a charge/current conversion gain of 700 pA per electron, an equivalent noise charge (ENC) of 15 electrons (e-) root mean square (RMS), and a full width half maximum (FWHM) of 230 eV at 5.9 keV. In this paper, we discuss the SiSeRO working principle, the readout module developed at Stanford, and the first characterization test results of the SiSeRO prototypes. While at present only a proof-of-concept experiment, in the near future we plan to use next generation sensors with improved noise performance and an enhanced readout module. In particular, we are developing a readout module enabling Repetitive Non-Destructive Readout (RNDR) of the charge, which can in principle yield sub-electron ENC performance. With these developments, we eventually plan to build a matrix of SiSeRO amplifiers to develop an active pixel sensor with an on-chip ASIC-based readout system. Such a system, with fast readout speeds and sub-electron noise, could be effectively utilized in scientific applications requiring fast and low-noise spectro-imagers.