This paper summarizes the electrical characterization of MIM capacitor realized in three dimensions. Manufacturing of the device is described, as well as an electrical comparison of three dielectrics, Si3N4, Al2O3, Ta2O5 and two deposition methods, metal organic chemical vapor deposition (MOCVD) and atomic layer deposition (ALD). Selecting Al2O3 deposited by ALD, high density of 35 nF/mm2 is obtained with low leakage current. Statistical measurements put forward the industrial robustness of the device integrated in BiCMOS technology. Three circuits embedding this new device are characterized: a high-pass filter, a voltage-controlled oscillator (VCO), and a phase-locked loop (PLL). They demonstrate excellent performances with significant area and assembly costs savings.

This paper summarizes the electrical characterization of MIM capacitor realized in three-dimensional. High density of 35nF/mm 2 is obtained with low leakage current. Its integration in BiCMOS technology is demonstrated and three circuits are characterized

On examine le probleme de la fatigue sous chargements thermiques et mecaniques des superalliages utilises dans les turbines a gaz notamment aeronautiques. La simulation en laboratoire necessite d'utiliser conjointement des essais de fatigue thermique sur des structures simples et des essais de fatigue anisotherme sur des elements de volume. La modelisation est necessaire pour extrapoler les resultats aux conditions de service. Les equations basees sur une theorie viscoplastique unifiee a variables internes permettent de decrire le comportement en fatigue anisotherme. Les conditions severes en aeronautique impliquent souvent de considerer l'interaction entre l'oxydation, le fluage et la fatigue. On dispose de modeles d'endommagement dont la capacite de prevision devient satisfaisante.

Thermal-mechanical fatigue is addressed using the following methodology: volume element tests are used to check constitutive models as well as to investigate synergy effects and damage models. Structure tests as in thermal shock are used to validate models. This methodology is applied to two gas turbine materials: a wrought polycrystalline alloy, Superwaspaloy, for moderate temperature use, and aluminized single crystal AM1 superalloy for blades. The capabilities of viscoplastic constitutive models with internal variables are illustrated. A damage model is shown which describes the synergy between oxidation, creep and fatigue. Detrimental effects of aluminide coating for specific thermal mechanical loading paths are tentatively rationalized.

The thermal-mechanical fatigue behaviour of chromium-aluminium coated [001] single crystals of AM1, a nickel-base superalloy for turbine blades, is studied using a "diamond" shape cycle from 600° to 1100°C. Comparison with bare specimens does not show any significant difference in thermal-mechanical fatigue nor in isothermal low cycle fatigue at high temperature. Metallographic observations on fracture surfaces and longitudinal sections of specimens tested to fatigue life or to a definite fraction of expected life have shown that the major crack tends to initiate from casting micropores in the sub-surface area very early in bare and coated specimens, under low cycle fatigue or thermal-mechanical fatigue. But the interaction between oxidation and fatigue cracking seems to play a major role. A simple model proposed by Reuchet and Remy has been identified for this single crystal superalloy. Its application to the life prediction under low cycle fatigue and thermal-mechanical fatigue for bare and coated single crystals with different orientations is shown.