Nanodevices consisting of the suspended and supported parts of topological insulator Bi2Se3 nanowires were fabricated and measured at low and room temperatures. Probing of topological surface states, accompanied by the electrostatic field effect used to dynamically manipulate bending deformation, was carried out to monitor the external strain introduced into the suspended and supported parts within the same Bi2Se3 nanowire. Depending on the device geometry, pure elastic and elastoplastic types of concave deformation, as well as convex buckling deformation, were realized in the suspended parts of the nanowires. For various types of observed deformations, different magnitudes of increase in the Source-Drain resistance of the deformed part compared to the relaxed part of the same devices were determined. All suspended devices exhibit external strain-sensitive Shubnikov-de Haas oscillation frequencies representing the carriers of top and bottom surface states and bulk, whereas, in the case of supported devices, the bottom surface states are masked by a trivial 2DEG. The obtained results may be useful for strain engineering of TI materials, as well as for applications in NEMS and other areas related to suspended nanostructures.

A single transistor preamplifier circuit was designed to facilitate electrical detection of mechanical oscillations in nanoelectromechanical systems (NEMSs) at low temperatures. The amplifier was integrated in the close vicinity of the nanowire inside the cryostat to minimize cabling load and interference. The function of the circuit was impedance conversion for current flow measurements in NEMSs with a high internal resistance. The circuit was tested to operate at temperatures as low as 5 K and demonstrated the ability to detect oscillations in double-clamped bismuth selenide nanowires upon excitation by a 0.1 MHz–10 MHz AC signal applied to a mechanically separated gate electrode. A strong resonance frequency dependency on temperature was observed. A relatively weak shift in the oscillation amplitude and resonance frequency was measured when a DC bias voltage was applied to the gate electrode at a constant temperature.

Electrochemical impedance spectroscopy was applied for studying copper oxide (CuO) nanowire networks assembled between metallic microelectrodes by dielectrophoresis. The influence of relative humidity (RH) on electrical characteristics of the CuO nanowire-based system was assessed by measurements of the impedance Z. A slight increase of Z with increasing RH at low humidity was followed by a three orders of magnitude decrease of Z at RH above 50–60%. The two opposite trends observed across the range of the examined RH of 5–97% can be caused by water chemisorption and physisorption at the nanowire interface, which suppress electronic transport inside the p-type semiconductor nanowire but enhance ionic transport in the water layers adsorbed on the nanowire surface. Possible physicochemical processes at the nanowire surface are discussed in line with equivalent circuit parameters obtained by fitting impedance spectra. The new investigation data can be useful to predict the behavior of nanostructured CuO in humid environments, which is favorable for advancing technology of nanowire-based systems suitable for sensor applications.

Nanoelectromechanical (NEM) switches are potential candidates for memory and logic devices for low standby-current and harsh environment applications. Cryogenic operation of these devices would allow to use them, e.g., in space probes and in conjunction with quantum computers. Herein, it is demonstrated that cryogenic application requirements such as good flexibility and conductivity are satisfied by using Bi2Se3 nanoribbons as active elements in NEM switches. Experimental proof of principle NEM switching at temperatures as low as 5 K is achieved in volatile and non-volatile reversible regimes, exhibiting distinct ON and OFF states, backed by theoretical modelling. The results open new avenues for research and development of NEM systems at cryogenic temperatures.

Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS.

Dielectrophoresis is used to assemble nanowires between metallic electrodes to form scalable functional interconnects. The dielectrophoresis parameters are investigated for semiconductor copper oxide (CuO) nanowires that are desirable for energy conversion and storage, gas sensors and nanoelectromechanical systems. Experimental yields of multiple- and single-nanowire interconnects are explored at dielectrophoresis frequencies from 500 Hz to 500 kHz. The electrical properties of nanowire-electrode physical contact interfaces formed by dielectrophoresis, metal deposition, and dry mechanical transfer are investigated. The electrical transport mechanism in these interconnects is determined to be ohmic conductivity at small electric field, which is overtaken by an order of magnitude higher space charge limited conductivity for electric fields above 10(5) V/m. The developed method is demonstrated as a promising route to produce nanowire interconnects towards scalable on-chip nanoelectromechanical systems.

The yield and morphology (length, width, thickness) of stoichiometric Bi2Se3 nanoribbons grown by physical vapor deposition is studied as a function of the diameters and areal number density of the Au catalyst nanoparticles of mean diameters 8–150 nm formed by dewetting Au layers of thicknesses 1.5–16 nm. The highest yield of the Bi2Se3 nanoribbons is reached when synthesized on dewetted 3 nm thick Au layer (mean diameter of Au nanoparticles ~10 nm) and exceeds the nanoribbon yield obtained in catalyst-free synthesis by almost 50 times. The mean lengths and thicknesses of the Bi2Se3 nanoribbons are directly proportional to the mean diameters of Au catalyst nanoparticles. In contrast, the mean widths of the Bi2Se3 nanoribbons do not show a direct correlation with the Au nanoparticle size as they depend on the contribution ratio of two main growth mechanisms—catalyst-free and vapor–liquid–solid deposition. The Bi2Se3 nanoribbon growth mechanisms in relation to the Au catalyst nanoparticle size and areal number density are discussed. Determined charge transport characteristics confirm the high quality of the synthesized Bi2Se3 nanoribbons, which, together with the high yield and tunable morphology, makes these suitable for application in a variety of nanoscale devices.

Nanoelectromechanical systems (NEMS) are a promising novel technology for operation in extreme conditions (e.g. high temperature and radiation levels), where complementary semiconductor technology devices might fail due to electronic instability. An example for a NEMS device is a nanowire-based switch, which employs mechanical deflection of a nanowire to open and close an electrical circuit. To date, assembly and operation of individual nanowire based NEMS switches have been successfully demonstrated at laboratory level, but their further technological development remains a challenge. This chapter gives an insight into the current advances in applications of nanowires for NEMS switches. Synthesis, electrical and mechanical tests of the nanowires, their assembly in nanodevices, investigation of nanocontacts and optimization of switching parameters are discussed. Particular attention is devoted to characterization of mechanical properties of various semiconductor, such as germanium (Ge), bismuth selenide (Bi2Se3) and copper oxide (CuO) nanowires, and their operation as NEMS switches.

Size distribution, Young's moduli and electrical resistivity are investigated for CuO nanowires synthesized by different thermal oxidation methods. Oxidation in dry and wet air were applied for synthesis both with and without an external electrical field. An increased yield of high aspect ratio nanowires with diameters below 100 nm is achieved by combining applied electric field and growth conditions with additional water vapour at the first stage of synthesis. Young's moduli determined from resonance and bending experiments show similar diameter dependencies and increase above 200 GPa for nanowires with diameters narrower than 50 nm. The nanowires synthesized by simple thermal oxidation possess electrical resistivities about one order of magnitude lower than the nanowires synthesized by electric field assisted approach in wet air. The high aspect ratio, mechanical strength and robust electrical properties suggest CuO nanowires as promising candidates for NEMS actuators.

Electrostatically actuated nanobeam-based electromechanical switches have shown promise for versatile novel applications, such as low power devices. However, their widespread use is restricted due to poor reliability resulting from high jump-in voltages. This article reports a new method for lowering the jump-in voltage by inducing mechanical oscillations in the active element during the switching ON process, reducing the jump-in voltage by more than three times. Ge(0.9)1Sn(0.09) alloy and Bi2Se3 nanowire-based nanoelectromechanical switches were constructed in situ to demonstrate the operation principles and advantages of the proposed method.

This review summarizes relevant research in the field of electrostatically actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical interactions as well as studies of mechanically or electrically induced effects are covered. An examination of the complex nanocontact behaviour during various stages of the switching cycle is provided. The choice of the switching element and the electrode is addressed from the materials perspective, detailing the benefits and drawbacks for each. An overview of experimentally demonstrated NEM switching devices is provided, and together with their operational parameters, the reliability issues and impact of the operating environment are discussed. Finally, the most common NEM switch failure modes and the physical mechanisms behind them are reviewed and solutions proposed.

We report a strong tangential component of the reaction force at electrode to nanowire adhesive contact which was previously established using electrostatic attraction. The reaction force tangential component absolute value was found to be comparable to or even bigger than the corresponding normal component. This effect is important for understanding of the mechanics of nano-electromechanical devices. Both the experiment and the corresponding theory are presented. Fitting of the obtained analytical solutions to experimental data was used to measure the reaction force acting at the contact for several nanowire-electrode configurations.

An electrostatically induced resonance behaviour of individual topological insulator Bi2Se3 nanoribbons grown by a catalyst free vapour-solid synthesis was studied in situ by scanning electron microscopy. It was demonstrated that the relation between the resonant frequencies of vibrations in orthogonal planes can be applied to distinguish the nanoribbons with rectangular cross-sections from the nanoribbons having step-like morphology (terraces). The average Young's modulus of the Bi2Se3 nanoribbons with rectangular cross-sections was found to be 44 ± 4 GPa.

In this study we address the mechanical properties of Sb2S3 nanowires and determine their Young’s modulus using in situ electric-field-induced mechanical resonance and static bending tests on individual Sb2S3 nanowires with cross-sectional areas ranging from 1.1·104 nm2 to 7.8·104 nm2. Mutually orthogonal resonances are observed and their origin explained by asymmetric cross section of nanowires. The results obtained from the two methods are consistent and show that nanowires exhibit Young’s moduli comparable to the value for macroscopic material. An increasing trend of measured values of Young’s modulus is observed for smaller thickness samples.

We present an investigation of contact properties of a germanium (Ge) nanowire based nanoelectromechanical (NEM) switch in its ON state. The contact stiffness in the ON state was evaluated by detecting the nanowire's resonance frequency. It was found that the resonance frequency increases when electric current flows through the nanowire/counter electrode contact area. The reason for modification in the contact area is referred to as electric-current-induced processes in the native oxide layer covering the nanowires. The presented resonance shift method is a simple way to indicate strengthening of the nanowire/counter electrode contact area without disassembling the contact.