The microscopic structure of Fe-based metallic glasses (Fe80Ga20)88B12$\left(\left(\right. \left(\text{Fe}\right)_{80} \left(\text{Ga}\right)_{20} \left.\right)\right)_{88} \left(\text{B}\right)_{12}$ (FeGaB) and (Fe90Co10)78Si12B10$\left(\left(\right. \left(\text{Fe}\right)_{90} \left(\text{Co}\right)_{10} \left.\right)\right)_{78} \left(\text{Si}\right)_{12} \left(\text{B}\right)_{10}$ (FeCoSiB) is investigated during in situ thermal annealing using extended X-ray absorption fine structure spectroscopy (EXAFS) above the Fe-K and Co-K absorption edges. FeGaB exhibits a phase transition above 450 degrees C, changing from amorphous glass to a partially crystalline structure. Its medium-range structure after this transition is modeled from crystalline alpha-Fe and FeGa3$\left(\text{FeGa}\right)_{3}$ reference structures, combined with amorphous nearest-neighbor (NN) contributions of Fe2B$\left(\text{Fe}\right)_{2} \text{B}$. Local order in the glass phase is described with the same model, restricted to NN interactions. Changes in the amorphous structure occur at annealing temperatures which coincide with typical observations of changes in magnetic behavior. Meanwhile, in FeCoSiB, the EXAFS response is highly different between the Fe-K and Co-K absorption edges. EXAFS oscillations on the Fe edge are strongly suppressed, as opposed to the Co edge which shows typical amplitudes. Limited resolution in this data set allows modeling only in the first amorphous shell, based on the NN distances from FeCo. The cause of the two materials' different EXAFS behavior at Fe-K despite similar iron content and identical experimental conditions is currently unknown and subject of further investigation.

AbstractConverse magnetoelectric sensors enable the detection of low‐frequency and low‐amplitude magnetic fields over a bandwidth of several kilohertz by combining the electrical excitation of a magnetoelectric resonator via a piezoelectric layer with an inductive readout. Here, a comprehensive sensor model is presented to further foster the development of this promising sensor concept. The model relates the output signal to the device characteristics, taking into account the magnetoelastic and electromechanical properties, the resonator geometry, and operating conditions. The sensor system is thoroughly experimentally analyzed to validate the model. Based on the analysis, the sensor concept is explained in detail, including the origin of its loss and bandwidth and their connection with the magneto‐mechanical loss in the magnetostrictive layer. Significant advances have been made in the comprehensive understanding of converse magnetoelectric sensors, providing a solid basis for future improvements in magnetoelectric sensor systems.

Controlled transport of biological cells in biomedical applications such as sorting, cell sequencing, and assembly of multicellular structures is a technological challenge. Research areas such as drug delivery or tissue engineering can benefit from precise cell location resulting in faster response rates or more complex tissue structures. Using computational methods, different soft magnetic elements with curved edges are designed to form a transport network, enabling transport and all functionalities for the manipulation of microbeads and cells on surfaces by rotational magnetic fields. Building blocks with bimodal functionalities due to segments of differently curved edges permit breakpoints as well as switchable transport via splitting and combining elements. Connecting the elements, networked paths are realized which allow variable movement patterns of magnetic carriers and cells. The direction of magnetic field rotation is altered to direct the beads and cells into different transport lines, and the exact timing is not critical. The networks are used to achieve deterministic movement of microbeads and cells with minimal intervention. Programmed transport over one millimeter with cell transport velocities of several micrometers per s is demonstrated. Based on scalable microchip technology, the networks can be integrated with CMOS-compatible materials and straightforwardly combined with sensing and diagnostic structures.

This letter uses a surface acoustic wave magnetic field sensor for measurement and closed-loop current control of the inductor current in a GaN-based dc-dc power converter. The sensor is based on aluminium scandium nitride thin films with relatively high Sc concentration of 32% and fabricated on low-cost 8-in silicon substrate, with a magnetostrictive FeCoSiB film on top of a SAW delay line. The device has dc and bidirectional current measurement capability (derived from the magnetic flux density around a current trace) and is operated electrically isolated above the current trace. With permanent magnets as magnetic bias, the setup has a usable bidirectional current range of ±5 A. A phase detector IC measures the phase shift between the 296 MHz, 19 dBm input, and 35 dB attenuated output signal of the delay line sensor. The active sensor area has a distance of 2.5 mm from the current trace. In a 1.2 mT bias, the sensor is operated with a sensitivity of 18.28°/mT and bipolar current range of up to ±5 A. The sensor signal is enhanced by an analog filter to compensate the over 1 µs delay from the delay line and readout circuit. Finally, the sensor is used as the input of an analog hysteretic current control loop. The closed-loop current control operation is demonstrated using a 48 V GaN-based half-bridge dc-dc converter with 16 kHz triangular inductor current.

Plasma-based processes are key applications in microsystems technology and are mainly used for the deposition and modification of thin films. A strong dependence on used equipment and materials can easily affect plasma processes and results in many differences of process characteristics like energy flow and deposition rates. For a deeper understanding of inclined magnetron-deposited thin films, a passive thermal probe was used to investigate the correlation between the film growth of two commonly used metallic target materials (Cu and Ni 46.8/Ti 53.2) and the energy flow from the plasma to the substrate. The special design of the sputtering system with a fixed angle of 45° between targets and substrate allows homogeneous coating of 200mm wafers with 100mm targets. The passive thermal probe measurements were performed radially across the substrate area for two different magnetron positions. Complementary surface and cross-sectional analysis of the deposited layers by atomic force microscopy, focused ion beam technique, and fracture edge analysis by scanning electron microscopy were performed on thin film samples on silicon substrate to investigate the growth rate and structure of the films. The films deposited in these experiments exhibit randomly oriented crystalline grains and heavily position-dependent change in surface topography and morphology from compact films to columnar growth, for Cu and NiTi respectively.

For the best possible limit of detection of any thin film-based magnetic field sensor, the functional magnetic film properties are an essential parameter. For sensors based on magnetostrictive layers, the chemical composition, morphology and intrinsic stresses of the layer have to be controlled during film deposition to further control magnetic influences such as crystallographic effects, pinning effects and stress anisotropies. For the application in magnetic surface acoustic wave sensors, the magnetostrictive layers are deposited on rotated piezoelectric single crystal substrates. The thermomechanical properties of quartz can lead to undesirable layer stresses and associated magnetic anisotropies if the temperature increases during deposition. With this in mind, we compare amorphous, magnetostrictive FeCoSiB films prepared by RF and DC magnetron sputter deposition. The chemical, structural and magnetic properties determined by elastic recoil detection, X-ray diffraction, and magneto-optical magnetometry and magnetic domain analysis are correlated with the resulting surface acoustic wave sensor properties such as phase noise level and limit of detection. To confirm the material properties, SAW sensors with magnetostrictive layers deposited with RF and DC deposition have been prepared and characterized, showing comparable detection limits below 200 pT/Hz(1/2) at 10 Hz. The main benefit of the DC deposition is achieving higher deposition rates while maintaining similar low substrate temperatures.

In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO2 layer, and a magnetostrictive FeCoSiB film. The detection limit of this sensor is 2.4 nT/Hz at 10 Hz and 72 pT/Hz at 10 kHz at an input power of 20 dBm. The dynamic range was found to span from about ±1.7 mT to the corresponding limit of detection, leading to an interval of about 8 orders of magnitude. Fabrication, achieved sensitivity, and noise floor of the sensors are presented.

Surface acoustic wave magnetic field sensors based on guided Love waves using the ΔE effect of a magnetostrictive thin film have been shown to be promising candidates for the measurement of weak fields at low frequencies as required for biomagnetic applications or as current sensors benefitting from the large dynamic range and bandwidth. The deposition of soft magnetic films with high magnetostriction is, however, more challenging on piezoelectric substrates such as quartz than on silicon. Thermally induced anisotropic expansion during the deposition process or during post-deposition magnetic field annealing leads to uniaxial stresses acting on the films, which makes the precise control of magnetic anisotropy difficult. Accordingly, this work analyzes the influence of the deposition process and heat treatment on the performance of Love wave devices. ST-cut quartz based delay line surface acoustic wave sensors with a SiO2 guiding layer are employed, and a 200 nm layer of amorphous magnetostrictive (Fe90Co10)78Si12B10 is used as the sensitive element. Magneto-optical imaging is performed for magnetic domain characterization, and the sensor performance is characterized in terms of bias field dependent phase sensitivity and frequency dependent phase noise. By performing a low temperature deposition in an external magnetic field, considerable improvement in limits of detection at biomagnetic relevant frequencies down to 70 pT/Hz at 10 Hz and 25 pT/Hz at 100 Hz is achieved.

MEMS sensors based on magnetoelectric composites have attracted great interest due to their capability to detect weak magnetic fields, showing high potential in applications like biomagnetic field detection and magnetic particle imaging. This paper reports on a scandium aluminum nitride thin film-based MEMS magnetoelectric sensor. The sensor consists of a polycrystalline silicon cantilever with a size of 1000 μm × 200 μm covered by a piezoelectric Al0.73Sc0.27N and a magnetostrictive (Fe90Co10)78Si12B10 thin film. The performance of the presented sensor is investigated based on the magnetoelectric (ME) voltage coefficient, voltage noise density, and limit of detection and compared to the characteristics of the aluminum nitride thin film-based ME sensor with the same layout and fabrication technology. By using an Al0.73Sc0.27N thin film with a higher piezoelectric activity instead of AlN in MEMS ME sensors, the ME voltage coefficient of (1334 ± 84) V/cm Oe in resonance is almost double, thereby lowering the requirements for the electronic system. The limit of detection of (60 ± 2) pT/Hz0.5 remains unchanged due to the dominant thermomechanical noise in resonance.

In this work surface acoustic Love wave delay line magnetic field sensors with varying magnetostrictive layer thicknesses are discussed. Amorphous FeCoSiB is used as the sensitive layer with a thickness variation in the range of 25-400 nm. Each sensor is analyzed both by magneto-optical methods as well as electrical signal and noise measurements. In accordance with previously reported simulation results, the impact on the acoustically propagating wave's velocity distinctly increased with thicker magnetostrictive layers leading to magnetic sensitivities as high as 35 rad/T for a delay line coated with 400nm thick FeCoSiB. Measurements of the sensor-intrinsic phase noise revealed distinct flicker phase noise that scales proportionally with the increase in magnetic sensitivity, thus leading to virtually constant limits of detection (LOD). Assuming that the observed flicker noise is caused by magnetic hysteresis losses due to the high-frequency excitation of the magnetic material, the LOD's independence of the magnetic sensitivity can even be shown analytically. However, it also becomes clear that such sensors need a magnetostrictive coating with a minimum thickness of at least 50 nm such that the signal-to-noise ratio is dominated by the magnetic material and not by fundamental noise contributions of the substrate. On the contrary, layers with thickness above 300 nm lead to distinct higher hysteresis losses that outrun the simultaneous increase in sensitivity, thus leading to a worse overall performance. (C) 2020 Elsevier B.V. All rights reserved.

Superparamagnetic iron oxide nanoparticles (SPIONs) are an important tool for labeling cells and tissues in many therapeutic and diagnostic applications, such as magnetic resonance imaging (MRI) and magnetic particle imaging (MPI). However, these methods require large and expensive instrumentation. Here we show that our magnetic susceptibility particle mapping (MSPM) system can achieve the detection of magnetic nanoparticles in an inexpensive and small device. The system is based on magnetoelectric (ME) sensors utilizing the Delta E effect in combination with a permanent magnet that is generating a bias field for the sensor and at the same time is magnetizing the SPIONs in the sample. The permanent magnet is placed above the sensor, and the sample is rotated through the gap in between. The magnetized SPIONs in the sample generate an additional magnetic field that can be detected by the ME sensor. The clear novelty of our approach is the use of a rotating sample, generating a periodic signal, which enables an easy separation of the desired signal from the background signal and the possibility to compensate drift, which is commonly observed in ME sensor measurements. With this improvement and the use of a ME sensor that is sensitive for low frequencies the setup is able to measure significantly smaller amounts of magnetic nanoparticles than previous approaches described in the literature and we are even able to reconstruct 2D nanoparticle distributions. The noise floor, also referred to as limit of detection (LOD), of this measurement system is around 500 pT/(Hz)(1/2). The detection threshold of our MSPM system is 20 mu g SPIONs in a volume of 200 mm(3) and the spatial resolution is in the range of a few mm. The spatial resolution is determined by reconstructing the particle distribution in the sample layer by solving the inverse problem. To demonstrate the feasibility of the method for detecting living cells, we measured the field distribution originating from SPION-labeled fibroblast cells in an alginate-gelatin matrix, thus demonstrating the potential of our method for biomaterial applications. (C) 2020 Elsevier B.V. All rights reserved.