Tunnel junctions are one of the key elements of chip-scale microsystems serving various technologies from classical microelectronics to quantum information. Aluminium and its oxide (AlOx) have dominated cryogenic tunnel junction technology for decades due to the high quality of AlOx barriers and Al superconducting properties below 1.2 K. However, many applications require non-superconducting junctions, either standalone or in combination with superconducting technology, motivating efforts to suppress Al superconductivity through magnetic fields, doping, or proximity effects – approaches that so far suffered from integration compatibility and scalability issues. Here, we present a CMOS-compatible normal-metal tunnel junction technology based on TiW alloy and AlOx barriers. We demonstrate wafer-scale fabrication of TiW/Al-AlOx/TiW junctions and validate their performance in Coulomb blockade thermometers operating down to 20 mK, confirming robust normal-state behavior. This TiW-based architecture offers a scalable solution for non-superconducting tunnel junctions across a broad temperature range, enabling integration into advanced cryogenic, quantum and nanoelectronic chip-level systems.

Abstract On-demand qubit-state initialization is a prerequisite for quantum computation. We demonstrate such a protocol in a device consisting of fixed-frequency transmon qubits pair-wise coupled via tunable couplers — an architecture that is also compatible with the surface code. We use tunable couplers to transfer any undesired qubit excitation to the readout resonator of the qubit, from which this excitation decays into the feedline. In total, the combination of multi-level qubit reset, leakage reduction, and coupler reset takes only 88 ns to complete. Our reset scheme is fast, unconditional, and achieves fidelities above 99%, thus enabling fixed-frequency qubit architectures as future implementations of fault-tolerant quantum computers.

Superconducting qubits are one of the most promising physical systems for implementing quantum computers. However, executing quantum algorithms of practical computational advantage requires further improvements in the fidelities of qubit operations, which are currently limited by the energy relaxation and dephasing times of the qubits. Here, we report our measurement results of a high-coherence transmon qubit with energy relaxation and echo dephasing times surpassing those in the existing literature. We measure a qubit frequency of 2.9 GHz, an energy relaxation time T1 with a median of 425 μs and a maximum of (666 ± 33)μs, and an echo dephasing time T 2 echo with a median of 541 μs and a maximum of (1057 ± 138)μs. We report in detail our design, fabrication process, and measurement setup to facilitate the reproduction and wide adoption of high-coherence transmon qubits in the academia and industry.

It is advantageous for any quantum processor to support different classes of two-qubit quantum logic gates when compiling quantum circuits, a property that is typically not present in existing platforms. In particular, access to a gate set that includes support for the CZ-, iSWAP-, and SWAP-type families of gates renders conversions between these gate families unnecessary during compilation, as any two-qubit Clifford gate can be executed using at most one two-qubit gate from this set, plus additional single-qubit gates. We experimentally demonstrate that a SWAP gate can be decomposed into one iSWAP gate followed by one CZ gate, affirming a more efficient compilation strategy over the conventional approach that relies on three iSWAP or three CZ gates to replace a SWAP gate. Our implementation makes use of a superconducting quantum processor design based on fixed-frequency transmon qubits coupled together by a parametrically modulated tunable transmon coupler, extending this platform’s native gate set so that any two-qubit Clifford unitary matrix can be realized using no more than two two-qubit gates and single-qubit gates.

We have designed and fabricated an integrated two-stage SQUID amplifier, requiring only one bias line and one flux setpoint line. From the biasing viewpoint the two stages are connected in series while from the signal propagation viewpoint the stages are cascaded. A proof-of principle demonstration at T = 4.2 K is presented.

Quantum processors require a signal-delivery architecture with high addressability (low crosstalk) to ensure high performance already at the scale of dozens of qubits. Signal crosstalk causes inadvertent driving of quantum gates, which will adversely affect quantum-gate fidelities in scaled-up devices. Here, we demonstrate packaged flip-chip superconducting quantum processors with signal-crosstalk performance competitive with those reported in other platforms. For capacitively coupled qubit-drive lines, we find on-resonant crosstalk better than -27 dB (average -37 dB). For inductively coupled magnetic-flux-drive lines, we find less than 0.13 % direct-current flux crosstalk (average 0.05 %). These observed crosstalk levels are adequately small and indicate a decreasing trend with increasing distance, which is promising for further scaling up to larger numbers of qubits. We discuss the implication of our results for the design of a low-crosstalk, on-chip signal delivery architecture, including the influence of a shielding tunnel structure, potential sources of crosstalk, and estimation of crosstalk-induced qubit-gate error in scaled-up quantum processors.

The realization of fault-tolerant quantum computing requires the execution of quantum error-correction (QEC) schemes, to mitigate the fragile nature of qubits. In this context, to ensure the success of QEC, a protocol capable of implementing both qubit reset and leakage reduction is highly desirable. We demonstrate such a protocol in an architecture consisting of fixed-frequency transmon qubits pair-wise coupled via tunable couplers -- an architecture that is compatible with the surface code. We use tunable couplers to transfer any undesired qubit excitation to the readout resonator of the qubit, from which this excitation decays into the feedline. In total, the combination of qubit reset, leakage reduction, and coupler reset takes only 83ns to complete. Our reset scheme is fast, unconditional, and achieves fidelities well above 99%, thus enabling fixed-frequency qubit architectures as future implementations of fault-tolerant quantum computers. Our protocol also provides a means to both reduce QEC cycle runtime and improve algorithmic fidelity on quantum computers.

High-fidelity and rapid readout of a qubit state is key to quantum computing and communication, and it is a prerequisite for quantum error correction. We present a readout scheme for superconducting qubits that combines two microwave techniques: applying a shelving technique to the qubit that effectively increases the energy-relaxation time, and a two-tone excitation of the readout resonator to distinguish among qubit populations in higher energy levels. Using a machine-learning algorithm to post-process the two-tone measurement results further improves the qubit-state assignment fidelity. We perform single-shot frequency-multiplexed qubit readout, with a 140ns readout time, and demonstrate 99.5% assignment fidelity for two-state readout and 96.9% for three-state readout - without using a quantum-limited amplifier.

In superconducting quantum processors, the predictability of device parameters is of increasing importance as many labs scale up their systems to larger sizes in a 3D-integrated architecture. In particular, the properties of superconducting resonators must be controlled well to ensure high-fidelity multiplexed readout of qubits. Here we present a method, based on conformal mapping techniques, to predict a resonator's parameters directly from its 2D cross-section, without computationally heavy and time-consuming 3D simulation. We demonstrate the method's validity by comparing the calculated resonator frequency and coupling quality factor with those obtained through 3D finite-element-method simulation and by measurement of 15 resonators in a flip-chip-integrated architecture. We achieve a discrepancy of less than 2% between designed and measured frequencies, for 6-GHz resonators. We also propose a design method that reduces the sensitivity of the resonant frequency to variations in the inter-chip spacing.

A SQUID tandem is a two-stage amplifier consisting of the front end SQUID at T << 1 K and the booster SQUID at T ∼ 4 K. We give an overview of the dc SQUID design for the tandem used in the recent 37-pixel frequency domain multiplexed (FDM) readout demonstration of X-ray calorimeters. The SQUID devices were fabricated with pillar-type Josephson junctions at the nominal JC = 500 A/cm 2 critical current density. We further discuss possible improvements to the FDM tandem configuration, including (i) the class-B operation for better power efficiency, (ii) the input power combiner as an improvement over the simple T-junction summing, with the promise for larger multiplexing factors, and (iii) the new booster SQUID device. The new improved booster is a 8-parallel 66-series SQUID array fabricated with SWAPS Josephson junctions at the nominal J C = 1.5 kA/cm2 critical current density, and it shows dV/dΦ > 30 mV/Φ 0 gain in the symmetric-slope operation, as well as Φ N ≈ 0.05 μΦ 0 / Hz 1/2 flux noise.

We fabricate and characterize superconducting through-silicon vias and electrodes suitable for superconducting quantum processors. We measure internal quality factors of a million for test resonators excited at single-photon levels, on chips with superconducting vias used to stitch ground planes on the front and back sides of the chips. This resonator performance is on par with the state of the art for silicon-based planar solutions, despite the presence of vias. Via stitching of ground planes is an important enabling technology for increasing the physical size of quantum processor chips and is a first step toward more complex quantum devices with 3-D integration.

In the work on superconducting parametric amplifiers, the frequency band below one gigahertz is calling for systematic improvements. Despite a prospect for ultralow added noise, bandwidth limitations have slowed down the integration of such amplifiers into sub-GHz experiments demanding fast ($< 1\, \mu$s) readout speeds. Here, we study the impedance engineering of a flux-driven Josephson parametric amplifier (JPA) at 600 MHz. We propose, simulate and experimentally demonstrate a partially reconfigurable impedance transformer. The transformer enhances the JPA bandwidth to a state-of-the-art value of 10 MHz at 20 dB gain. Our amplifier has immediate applications in the readout of cryogenic sensors and in the reflectometry of quantum dots for spin qubit quantum computing.

We have integrated single and coupled superconducting transmon qubits into flip-chip modules. Each module consists of two chips—one quantum chip and one control chip—that are bump-bonded together. We demonstrate time-averaged coherence times exceeding 90 μs, single-qubit gate fidelities exceeding 99.9%, and two-qubit gate fidelities above 98.6%. We also present device design methods and discuss the sensitivity of device parameters to variation in interchip spacing. Notably, the additional flip-chip fabrication steps do not degrade the qubit performance compared to our baseline state-of-the-art in single-chip, planar circuits. This integration technique can be extended to the realisation of quantum processors accommodating hundreds of qubits in one module as it offers adequate input/output wiring access to all qubits and couplers.

We present here our recent results on qubit reset scheme based on a quantum-circuit refrigerator (QCR). In particular, we use the photon-assisted quasiparticle tunneling through a superconductor--insulator--normal-metal--insulator--superconductor junction to controllably decrease the energy relaxation time of the qubit during the QCR operation. In our experiment, we use a transmon qubit with dispersive readout. The QCR is capacitively coupled to the qubit through its normal-metal island. We employ rapid, square-shaped QCR control voltage pulses with durations in the range of 2--350 ns and a variety of amplitudes to optimize the reset time and fidelity. Consequently, we reach a qubit ground-state probability of roughly 97% with 80-ns pulses starting from the first excited state. The qubit state probability is extracted from averaged readout signal, where the calibration is based of the Rabi oscillations, thus not distinguishing the residual thermal population of the qubit.

The scaling up of quantum computers operating in the microwave domain requires advanced control electronics, and the use of integrated components that operate at the temperature of the quantum devices is potentially beneficial. However, such an approach requires ultralow power dissipation and high signal quality to ensure quantum-coherent operations. Here we report an on-chip device that is based on a Josephson junction coupled to a spiral resonator and is capable of coherent continuous-wave microwave emission. We show that the characteristics of the device accurately follow a theory based on the perturbative treatment of a capacitively shunted Josephson junction as the gain element. The infidelity of typical quantum gate operations due to phase noise of this cryogenic 25 pW microwave source is less than 0.1% up to 10 ms evolution time, which is below the infidelity caused by dephasing in state-of-the-art superconducting qubits. Together with future cryogenic amplitude and phase modulation techniques, our approach may lead to scalable cryogenic control systems for quantum processors. An on-chip device that is based on a Josephson junction coupled to a fabricated superconducting resonator can provide a source of coherent microwave radiation for potential use in scaled quantum circuits.

We present a cryogenic microwave noise source with a characteristic impedance of 50 Ω, which can be installed in a coaxial line of a cryostat. The bath temperature of the noise source is continuously variable between 0.1 K and 5 K without causing significant back-action heating on the sample space. As a proof-of-concept experiment, we perform Y-factor measurements of an amplifier cascade that includes a traveling wave parametric amplifier and a commercial high electron mobility transistor amplifier. We observe system noise temperatures as low as 680−200+20 mK at 5.7 GHz corresponding to 1.5−0.7+0.1 excess photons. The system we present has immediate applications in the validation of solid-state qubit readout lines.

M. R. Perelshtein, K. V. Petrovnin, V. Vesterinen, S. Hamedani Raja, I. Lilja, M. Will, A. Savin, S. Simbierowicz, ∗ R. N. Jabdaraghi, J. S. Lehtinen, L. Grönberg, J. Hassel, † M. P. Prunnila, J. Govenius, G. S. Paraoanu, and P. J. Hakonen ‡ QTF Centre of Excellence, Department of Applied Physics, Aalto University, P.O. Box 15100, FI-00076 AALTO, Finland QTF Centre of Excellence, VTT Technical Research Centre of Finland Ltd, P.O. Box 1000, FI-02044 VTT, Finland

The Lamb shift, an energy shift arising from the presence of the electromagnetic vacuum, has been observed in various quantum systems and established as the part of the energy shift independent of the environmental photon number. However, typical studies are based on simplistic bosonic models which may be challenged in practical quantum devices. We demonstrate a hybrid bosonic-fermionic environment for a linear resonator mode and observe that the photon number in the environment can dramatically increase both the dissipation and the effective Lamb shift of the mode. Our observations are quantitatively described by a first-principles model which we develop here also to guide device design for future quantum-technological applications. The device demonstrated here can be utilized as a fully rf-operated quantum-circuit refrigerator to quickly reset superconducting qubits.