Studying the heterogeneity in cancerous tissue is challenging in cancer research. It is vital to process the real-world data efficiently to understand the heterogeneous nature of cancer tissue. GPU compatible models, which can estimate the subpopulation of cancerous tissue, are fast if the size of input data, i.e., the number of qPCR (quantitative polymerase chain reaction) gene expression reading is extensive. In the real world, we rarely get that much data to reap the benefits of a GPU’s parallelism. Real experimental data from fibroblasts are much less, and models using those data on a GPU are slower than the CPU multithreaded application. This paper will show a method to run GPU-compatible models for cancer tissue heterogeneity on a multithreaded CPU. Further, we also show that the model running on a multithreaded CPU is faster than the model running on a GPU with real experimental data.

The Intel lithography roadmap calls for Extreme Ultraviolet Lithography (EUVL) to be used for the 32 nm node. With the installation of the EUV Micro-Exposure Tool (MET) complete, Intel now has the world's first integrated EUVL process line including the first commercial EUV exposure tool. This process line will be used to develop the EUV technology, including mask and resist, and to investigate issues such as defect printability. It also provides a test-bed to discover and resolve problems associated with using this novel technology in a fab (not lab) environment. Over 22,000 fields have been exposed, the discharge-produced plasma light source has operated for 50,000,000 pulses, 8 masks have been fabricated, and 8 resists have been characterized. The MET combines high resolution capability with Intel's advanced processing facilities to prepare EUVL for high-volume manufacturing (HVM). In this paper we review the MET installation and facilities, novel capabilities of the linked track, data on optics quality and modeled tool capability, and the MET mask fabrication process. We present data on tool performance including printing 45 nm 1/2 pitch lines with 160 nm depth of focus and 27 nm isolated lines. We show tool accuracy and repeatability data, and discuss issues uncovered during installation and use.

The source of flare in EUVL systems is mostly from the mid-spatial frequency roughness (1 /mum - 1 /mm spatial periods) of mirrors. Due to the challenges in polishing mirrors to a small. fraction of the wavelength, flare in EUV lithography tools is expected to be greater than flare in current DUV tools. Even though EUV flare is constant across the field, there can be within-die flare variations due to variations in layout density. Hence, it is expected that to meet the CD control requirements for the 32 nm node, Flare Variation Compensation (FVC), akin to Optical Proximity Correction (OPC) would be required. FVC needs the within-die flare level estimated by convolving the Point Spread Function due to scatter (PSFsc) with the mask layout. Thus, accurate knowledge of the system PSFsc is essential for FVC. Experimental results of the Modulation Transfer Function (MTF) technique to estimate flare and the PSFsc of the Engineering Test Stand (ETS) are presented. It was also determined that due to the nature of the PSFsc in EUVL tools a more accurate measure for flare would be to use the 0.5 mum line as opposed to the current 2 mum line standard for measuring flare on DUVL tools.

The minimum gate CD for the 32 nm node is 15 nm and the CD control requirement on the gate CD is < 2.5 nm 3σ. One of the major concerns for meeting these targets using EUV lithography is flare. Flare degrades the aerial image contrast which decreases the process window, and within-die chrome density variation results in local flare variation which worsens the CD control. Since mirror roughness contributes to flare, mirror polishing needs to be improved so that the Mid Spatial Frequency Roughness (MSFR) will be reduced to < 0.14 nm/mirror for 6 mirror imaging systems. In this paper, we will determine the minimum acceptable flare for the 32 nm node to meet the CD target and control requirements using modeling and present methods to meet them as demonstrated by experiments run on the Engineering Test Stand (ETS). Effectiveness of flare mitigation methods using chrome dummification and negative tone resists are quantified, and the capability of Flare Variation Compensation (FVC) to meet CD control targets are verified experimentally.

The success of extreme ultraviolet (EUV) lithography depends upon developing resists that meet the patterning requirements for the technology node in which EUV is inserted. This paper presents Intel's patterning requirements and development strategies for EUV resists. Two of the primary problems for EUV resists are meeting the linewidth roughness (LWR) requirement, and reducing resist absorbance to obtain good sidewall profiles. Benchmarking data shows that none of the current EUV photoresists meet LWR targets. Modeling results for EUV resists show the impact of resist absorbance on sidewall angle and resolution.

This work develops an exact logical operation model to predict the performance of the all-optical shared memory architecture (OSMA) class of packet switches, under random or bursty traffic. The model also provides a means to obtain a reasonable approximation of OSMA switch element performance within certain types of networks, including the Banyan family

The experimental demonstration of MOSAIC, a reconfigurable WDM add/drop network with subcarrier multiplexed control, is presented. The MOSAIC network implements the optical layer protocol to support bit-rate transparent multichannel lightpaths. Two types of add/drop multiplexers are implemented and combined in a three-node experiment. Multihop lightpaths are established giving an end-to-end bit error rate of better than 10/sup -9/ at 1.2 Gbps. The reconfigurable add/drop multiplexer is based on a novel dilated 2/spl times/2 acoustooptic filter switch crossconnect and an analog optoelectronic crossconnect that drives a ten-wavelength laser array transmitter up to 2.5 Gbps per wavelength. The fixed wavelength add/drop multiplexer utilizes a fast digitally tunable laser transmitter. Both add/drop multiplexers support bit-rate transparent 2R optoelectronic regeneration as well as wavelength translation. Subcarrier multiplexing on each wavelength is used to support channel state monitoring and channel equalization as well as transmission of digital network control information. Systems experiments demonstrate cascaded 2R optoelectronic regeneration with wavelength translation and cascaded multichannel optical switching with up to seven hops. It is shown that combining cascaded 2R optoelectronic regeneration with cascaded multichannel optical switching can be used to balance jitter accumulation and amplified spontaneous emission generated amplitude noise to yield high signal-to-noise ratio for lightpaths.

This paper describes experimental and simulation results of the optical packet experimental routing architecture (OPERA) project. The OPERA network is based on a novel optical network interface router design that is optically regenerative and supports optical Internet protocol related functions including label swapping, packet routing and forwarding operations and wavelength reuse. Routing is based on subcarrier multiplexed header addressing, packet-rate wavelength conversion, and arrayed waveguide router technology. The routers are cascadable and use a unique double stage wavelength converter that supports header regeneration/replacement and maintains the payload extinction ratio. This approach overcomes dispersion limitations normally encountered using double sideband subcarrier multiplexing across a network. A discrete time simulation of the physical transport in an 8-hop network is reported. Multihop routing is experimentally demonstrated between two all-optical nodes and three input-output (I-O) ports of a waveguide grating array router. Packet-rate subcarrier header processing and wavelength conversion between six wavelengths is shown with high signal-to-noise ratio (SNR) of recovered payload and headers at each hop.

The challenge of making a monolithic electrically tunable laser source for wavelength division multiplexing (WDM) applications covering at least the 30 nm Erbium doped fiber amplifier (EDFA) optical window led to different approaches to extend the limited tuning range (<15 nm) of common DBR lasers. In the following, we will comment on three types: the Vertical Coupler Filter (VCF) laser, the Sampled-DBR (S-DBR) laser or its improved version the Super Structure Grating DBR (SSG-DBR) laser and the Grating assisted Coupler with Sampled Rear reflector (GCSR) laser. These lasers use carrier induced index change geared up to achieve the wide electrical tuning. Their performance has been continually improved in term of tuning range, wavelength coverage, output power and side mode suppression. Wavelength coverage of 67 nm in a GCSR laser and of 62 nm in SSG-DBR lasers has been demonstrated requiring a three-tuning-current control. Their tuning mechanism and tuning characteristics are discussed as well as linewidth, power and wavelength switching speed. Various switching experiments have been performed that demonstrate switching times between 4 and 20 ns. The latency incurred when switching between wavelengths is due to the spontaneous carrier lifetime.

In conclusion, we measured switching time in a widely tunable gating assisted codirectional coupler with sampled Bragg reflector (GCSR) laser and showed that it depends on the carrier lifetime and the static-tuning characteristic. By using pre-distortion technique, a decrease of switching time by a factor 2 could be measured

An accurate simulation model which provides an effective method of optimizing an optical subcarrier multiplexed (OSCM) communication network is developed and experimentally demonstrated. Effects of MMIC insertion and two types of header receiver schemes are studied, and the initial performance of MMIC components are presented.

Fiber-optic networks offer the potential to support very wideband, flexible communications for future analog and digital applications. Optical subcarrier multiplexing (OSCM) allows parallel data channels to be transmitted on an optical fiber using a single optical source. One application of OSCM is out-of-band signaling in optical fibers where the &ita channel is transmitted at baseband and the control channel multilplexed onto an RF subcarrier. The control channel is easily recovered by following photodetection with a microwave bandpass filter. Digital information transmitted on the microwave subcarrier can be used to setup end-to-end connections in a circuit switched network;, handle contention resolution [ 13, and transmit headers in packet-based networks [2, 3,4].

Multiwavelength laser arrays are an important component for future wavelength division multiplexed (WDM) links and networks. In this paper we demonstrate a 10-wavelength multiwavelength transmitter with improved electrical and optical crosstalk performance. Simultaneous modulation of 10 lasers at 2.5 Gbps per channel is demonstrated with low crosstalk resulting in a 25 Gbps data rate into the fiber.

We present an experimental demonstration of a multinode WDM multihop packet network interconnected with an arrayed-waveguide router. Each node has the full functionality to route packets with subcarrier multiplexed headers and perform fast wavelength translation between four wavelengths and space switching between a local host and an 8/spl times/8 waveguide-grating array router. Packets consist of a 3050 bit payload at 2.5 Gbps and a 122-bit NRZ header at 100 Mbps multiplexed on a 3-GHz subcarrier. Our demonstration incorporates several new performance enhancing subsystems, which previous demonstrations lacked. These enhancements include fast, uniform wavelength-conversion-switching performed using a novel current injection circuit in combination with a four-section wavelength tunable GCSR laser yielding wavelength switching times under 4 ns for all wavelengths required by the node. Simultaneous wavelength conversion of subcarrier multiplexed packet headers and baseband payload via cross gain saturation in semiconductor optical amplifiers is shown to preserve the header through multiple all-optical hops. We have also implemented a different header recovery technique on each node: coherent RF heterodyning on one node and incoherent RF detection using a fast Schottky barrier diode on the other.

The experimental demonstration of an all-optical routing node for multihop packet wavelength routed networks is described, Packets are routed in real time between three space ports and five wavelengths using subcarrier multiplexed encoded headers, Fast wavelength conversion over 40 nm is achieved using a novel four section tunable semiconductor laser and a semiconductor optical amplifier, Simultaneous wavelength conversion of the baseband payload and subcarrier multiplexed header is also demonstrated.

Complete wavelength coverage over 67 nm was measured with SMSR better than 25 dB using a grating assisted codirectional coupler with WDM sampled rear reflector (GCSR) laser. Wavelength switching time for coupler current step was also measured.