A 63nm Twin Flash memory cell with a size of 0.0225 mum2 / 2 (4) bits is presented. The cell is proposed for data Flash products with 4 to 16 Gbit densities. To achieve small cell areas, a buried bit line and an aggressive gate length of ~100 nm are the key features of this 63nm Twin Flash cell. The cell is well capable of 2 and 4 bit operation.