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    台灣積體電路製造公司

    台灣積體電路製造公司

    Taiwan Semiconductor Manufacturing Company Inc.
    企业EST. 1987
    940论文总数
    1.5万引用总数

    论文量&引用量时间轴

    机构学者

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    Tsung-Yung Jonathan Chang
    Tsung-Yung Jonathan Chang
    Taiwan Semiconductor Manufacturing Company
    论文:51引用:0H-index:0
    Yu-Der Chih
    Yu-Der Chih
    Embedded Nonvolatile Memory Library Department, Memory Solution Division, Taiwan Semiconductor Manufacturing Company
    论文:46引用:0H-index:0
    Meng-Fan (Marvin) Chang
    Meng-Fan (Marvin) Chang
    Memory Design Lab, Department of Electrical Engineering, National Tsing Hua University
    论文:32引用:0H-index:0
    Jonathan Chang
    Jonathan Chang
    Facebook
    论文:28引用:0H-index:0
    Matthias Passlack
    Matthias Passlack
    Taiwan Semiconductor Manufacturing Company Ltd.
    论文:20引用:0H-index:0
    Hung-Jen Liao
    Hung-Jen Liao
    Taiwan Semiconductor Manufacturing Company
    论文:20引用:0H-index:0
    Burn J. Lin
    Burn J. Lin
    National Tsing Hua University
    论文:18引用:0H-index:0
    H.-S. Philip Wong
    H.-S. Philip Wong
    Department of Electrical Engineering, School of Engineering, Stanford University;Wu Tsai Neurosciences Institute, Stanford University;TSMC
    论文:17引用:0H-index:0
    Win-San Vince Khwa
    Win-San Vince Khwa
    Corporate Research Design Solution Department, Taiwan Semiconductor Manufacturing Company
    论文:17引用:0H-index:0

    论文(940)

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    1Correlation Between Defects in Grain Boundaries and Reverse Short-Channel Effects in Polysilicon Thin-Film Transistors
    Geng-Yuan Xie,Guo-Wei Huang,Pei-Wen Li,Horng-Chih Lin

    This work investigates the anomalous decrease in subthreshold swing (SS) with decreasing channel length observed in poly-Si thin-film transistors (TFTs) with an undoped channel. Simulation analysis is performed on poly-Si TFTs and devices built on silicon-on-insulator to understand the reason behind this observation. The results indicate that this phenomenon is closely related to defects in the grain boundaries (GBs) of the poly-Si channel. For poly-Si TFTs, modulation of the channel potential relies on increasing the gate bias to induce charges for filling the GB traps. Since a portion of the traps in the source/drain junctions has been charged, it facilitates the modulation of the channel potential. As the channel is shortened, the fraction of the depletion regions of the junction in the channel increases, leading to a reduction in SS.

    2026JAPANESE JOURNAL OF APPLIED PHYSICS(2026)引用:1
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    2Effects of Composition and Ozone Treatment on the Electrical Performance and Stability of ALD Indium Gallium Oxide TFTs
    Hsiang-Chao Yang, Yun-Tse Li, Guan-Han Lin, Yu Chen, Yan-Kui Liang, Chien-Wei Chen,Tsung-Te Chou,Chi-Chung Kei,Huai-Ying Huang, Feng-Cheng Yang, Yu-Ming Lin,Chun-Hsiung Lin

    Thin-film transistors (TFTs) featuring ultrathin (approximate to 3 nm) indium gallium oxide (InGaO) channels synthesized by atomic layer deposition (ALD) with systematically varied In:Ga ratios (30%-90% In) were studied. A tradeoff between threshold voltage (V-T) and field-effect mobility (mu(FE)) is observed with varying In content in the channel. As the In-content reaches between 60% and 75%, the device changes from enhancement mode to depletion mode. By adding an O-3 treatment after source/drain formation, the devices exhibited significant enhancement in subthreshold characteristics and stability. Notably, the 90% In-content TFT evolves from nonideal to excellent ON-OFF characteristics, exhibiting a subthreshold slope as low as similar to 65 mV/dec. Meanwhile, mu FE increases monotonically with increasing In concentration, reaching a maximum of 47.1 cm(2)/V s for the device with a 90% In-content channel after O-3 treatment. The linear correlation between mu FE and 1/RCH verifies that the enhancements of mu FE with In-content result dominantly from intrinsic channel conductance. Positivebias-stress (PBS) stability is dramatically improved after O-3 treatment. Threshold voltage shifts (triangle V-T) after stressed at V-G = V-T + 3 V for 3600 s are 9 and 64 mV for channels with 60% and 75% In-content, respectively. These findings underscore the potential of combining compositional engineering and O-3 treatment to achieve high-performance and stable oxide TFTs for future low-power electronics.

    2026IEEE TRANSACTIONS ON ELECTRON DEVICES(2026)引用:1
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    3Impact of Spinning and Coating Parameters on Morphology and CO2/N2 Separation Performance of Pebax Composite Hollow Fiber Membranes
    Che-Wei Chang, Qing-Yun Chou, Jeng-Jyi Hwang, Hui-Hsin Tseng, Juin-Yih Lai, Tai-Shung Chung

    Membrane-based CO2 capture has emerged as a promising solution to mitigate global climate change. In this study, outside-in three-layer Pebax/PDMS/PSU composite hollow fiber membranes (HFMs) were developed for CO2/N2 separation, guided by a bottom-up design strategy. To minimize the transport resistance of PSU substrates and intrusion of gutter-layer solutions, the effects of PSU concentration, nonsolvent additives, and bore-fluid composition during the spinning of hollow fiber substrates were systematically investigated. The optimized PSU substrate enabled the formation of PDMS/PSU composite HFMs exhibiting a high CO2 permeance of approximately 4400 GPU with a CO2/N2 selectivity of 10.69 in pure-gas tests. Subsequently, the Pebax selective layer was deposited onto the PDMS gutter layer via dip coating, with precise control over plasma activation, withdrawal speed, and Pebax concentration to regulate surface wettability and coating hydrodynamics. Under optimal conditions, the resulting Pebax/PDMS/PSU HFMs achieved a CO2 permeance of 1366 GPU and a CO2/N2 selectivity of 24.50 at a Pebax concentration of 0.40 wt%, and a CO2 permeance of 1075 GPU and a CO2/N2 selectivity of 31.97 at 0.45 wt%. Importantly, the optimized membranes also demonstrated stable separation performance under mixed-gas (15/85 CO2/N2) and humid conditions, delivering CO2 permeances of 1106 and 859 GPU with corresponding CO2/N2 selectivity of 22.26 and 28.32 for 0.40 and 0.45 wt% Pebax coatings, respectively. This work highlights a scalable strategy that integrates the engineering of substrate morphology with hydrodynamics of selective-layer coating, providing an efficient way to develop next-generation composite HFMs for post-combustion CO2 capture.

    2026CARBON CAPTURE SCIENCE & TECHNOLOGY(2026)引用:1
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    4A 25.3% Area-Efficient 1CPP Mask ROM with Robust Power Mesh on 2-Nm NanoSheet Logic CMOS
    Ryota Watanabe, Kazumasa Uno, Hidemitsu Kojima, Ayumu Yamada, Hiromasa Otsubo, Ted Chu, Tsung-Hsien Huang,Hong-Chen Cheng,Koji Nii, Yih Wang,Tsung-Yung Jonathan Chang

    An area-efficient physical layout for a 1T ROM array with robust VSS mesh and coding procedure are proposed in this study. A 1.8 -Mbit 1CPP ROM macro on $2-\text{nm}$ Nanosheet logic CMOS technology shows the record bit-density of $160.7 \text{Mbit} / \text{mm}^{2}$ and access speed of 513 ps, as well as maximum operational frequency and active power are improved by 10.6% and 8.4% from the baseline layout, while suppressing the peak IR drop comparable to the baseline.

    20262026 IEEE/JSAP Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)(2026)
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    5Determination and Characteristics of Β-Sn Twin Boundaries in Sn–Ag–Cu Micro-Solder Joints
    Chieh-Pu Tsai, Zhong-Yen Yu, Liu-Hsin-Chen Yang, Chih-En Hsu, Kai-Chi Lin, Chih-Wen Chiu, Chung-Yu Chiu, Jui-Shen Chang, Chen-Nan Chiu, David T. Chu, Yao-Chun Chuang,Cheng-Yi Liu

    In this study, the characteristics of the grain boundaries of β-Sn grains in micro-Cu-pillar/Sn–Ag–Cu solder/Cu-pad joints were investigated through 110 and 100 pole figure analyses and Euler mapping. The twist and tilt grain boundaries and the corresponding rotation axis were identified, and the contour separation method and axis distribution analysis were employed to calculate the twisting and tilting angles, which were determined to be 38.54° ± 0.90° with rotation axis of < 2 3 0 > (Δ = 2.38° ± 0.08°) and 56.22° ± 0.27°with rotation axis of < 041 > (Δ = 3.82° ± 0.09°), respectively. The twist grain boundaries exhibited rapid migration toward the outer surfaces of the micro-solder bumps and eventually disappeared during aging. By contrast, the tilt grain boundary remained stable after 75 h of aging at 140 ℃, extending transversely through the solder bump. In addition, the stable tilt grain boundary was determined to be a twin grain boundary with a < 041 > axis and a 101 twin plane. The shift of the rotation axis in the 101 twin from the < 010 > direction can be identified by the < 041 > pole figure with shift angle of 7.9° ± 2.5° (Δ = 3.82° ± 0.09°); however, the 101 twinning plane still remains.

    2026Journal of Materials Science(2026)
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    合作机构(100)

    国立清华大学合作论文 69
    国立交通大学合作论文 51
    成功大学合作论文 44
    国立台湾大学合作论文 32
    International Medical Equipment Collaborative合作论文 29
    斯坦福大学合作论文 28
    嶺東科技大學合作论文 24
    英特尔公司合作论文 15
    密歇根大学合作论文 13
    鲁汶大学合作论文 13

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