Whispering gallery mode (WGM) resonantors are widely used as high sensitivity sensors due to their high quality factor, small microcavity volume and size. However, many WGM sensors are currently available only under laboratory conditions. Therefore, improving the anti-interference ability of coupling systems by packaging methods has received much attention in actual applications. For WGM sensors, the packaging method largely depends on the coupling method and sensing parameters. In this paper, we briefly introduce several coupling methods, especially the structural characteristics of coupling elements. Then, we review various packaging menthods, mainly including glue, holder, in fiber and microfluidic system packaging method. The final section provides a comprehensive overview of the sensing application of different packaged WGM sensors. It is hoped that this research will contribute to a clearer understanding of packaging methods and promote the practical application of WGM sensors.

Fluorescence film thickness and optical aberrations are important systematic error sources of curved surface metrology in fluorescence-aided scattering confocal microscopy (FSCM). In this paper, we established a tilted surface measurement model in FSCM to analyse the influence of fluorescent film thickness and aberrations on the measurement accuracy under different local slope angles of a curved surface. The simulation results demonstrate that the systematic errors caused by the fluorescence film thickness on free-form surface measurements increase with the local slope angle of the surface. The systematic errors caused by optical aberrations will lead to significant deviations between the measured and the actual surface when the local slope angle is greater than the complementary angle of the half aperture angle of the objective lens. Our studies allow for analysing the systematic errors caused by fluorescence film thickness and optical aberrations in different situations, thus contributing to the uncertainty evaluation of free-form surface measurement by FSCM.

In the domain of phase measuring deflectometry (or fringe projection profilometry), utilizing only a single-frame fringe pattern to achieve high-precision three-dimensional reconstruction has emerged as a focal point of ongoing research. To achieve four-step phase-shifting demodulation from a single-frame fringe pattern, this paper proposes a Polarization Interferometry Phase Measuring Deflectometry (PIPMD). This method primarily relies on a Michelson polarization interferometry structure to produce projected polarization interference fringes, which are then captured by a polarization camera as modulated single-frame deformed fringe patterns. These single-frame fringe patterns enable pixelated four-step phase shifting with adjacent 2 x 2 pixel units. To validate the proposed method, a series of experiments has been conducted, including surface shape detection of a concave spherical mirror and an off-axis parabolic mirror, as well as dynamic deformation measurements of a deformable mirror. All experimental results consistently indicate that the polarization interference-based fringe projection technique can achieve synchronized phase-shifting demodulation of single-frame fringe patterns, thereby facilitating high-precision reconstruction of the fringe patterns captured in a single frame. This synchronous phaseshifting technique can overcome the influence of air disturbances in traditional four-step phase-shifting methods, thereby enhancing the accuracy of phase demodulation. Additionally, this polarization interference-based Phase Measuring Deflectometry exhibits promising application prospects in dynamic measurements.

Ultra-short and ultra-intense pulsed lasers(femtosecond lasers)possess extremely high peak power,and hold broad application prospects in laser inertial confinement fusion,high-energy physics,laser micro-processing and other fields.The peak power of femtosecond pulsed lasers is a crucial parameter for evaluating the performance of ultra-short and ultra-intense pulsed laser systems.A peak power measurement method of terawatt-level femtosecond pulsed laser based on the spectral phase coherent direct electric field reconstruction was introduced,along with the composition and working principles of the measurement device.A set of peak power measurement device of terawatt-level femtosecond pulsed laser was constructed,and the sources as well as main factors of measurement uncertainty influencing the measurement results of peak power were analyzed and discussed.The repeatability of the peak power measurement is 2.9%,and the measurement uncertainty reaches 17.6%(k=2),which effectively addresses the issue of peak power measurement of terawatt-level femtosecond laser.

The measurement system of high energy laser beam quality factor β is mainly used for state debugging and comprehensive performance parameters diagnosis of laser system,while these parameters can evaluate the laser output performance and the far-field spot focusing ability of the laser system.Aiming at the defect that the beam quality factor β close to the diffraction limit occupying too few pixels in the area array detectors,a measurement method was proposed based on microscopic magnification with high-precision scanning slit,and the relevant scheme was analyzed and calculated.In addition,a verification scheme of measurement results using the combination of fixed aberration elements and collimator light sources was designed to analyze the uncertainty of measuring device of developed high energy laser beam quality factor β,and the measurement uncertainty was better than 10%.

针对共光路系统对环境温度的适应性问题，以温度-光学变形特性研究为基础，提出了一种基于综合传热的主镜组件分区域热控方法。建立了主镜组件的传热模型并分析了典型热控工况下的温度分布特性；对不同材质的主镜进行了热仿真，以热光学试验结果修正模型，使主镜温度场的仿真与实测结果绝对偏差小于1.4℃，同时确定了主镜组件的温度梯度控制阈值；采用分区传热策略，使主镜组件达到高温升水平、低温度梯度的热控目标。以某主镜组件为对象进行了仿真与试验：当主镜平均温升达到16℃以上时，镜体轴向温度梯度≤2.5℃，径向与周向温度梯度≤2.4℃，主镜面形变化量小于0.005λ，该结果可为共光路系统的整体热控方案设计提供优化思路。

近年来，磁流变抛光作为一种确定性加工方法已成为获得高精度非球面的重要手段。作者以回转对称二次抛物面为例，分析了磁流变抛光中使用抛光轮校正工件位置的理论方法，并通过实验在Φ230 mm熔石英样件上验证对刀理论，分别在X方向和Y方向以少于3次的调整次数校正工件位置，实现了X方向、Y方向偏置量均低于0.009 mm；采用磁流变抛光技术对工件进行了修形实验验证，加工后面形精度RMS由λ/7收敛至λ/40。实验结果表明：作者提出的非球面工件位置对刀校正方法简单、可靠，能够很好地对工件进行精确定位，利于高精度非球面磁流变抛光加工。

Diffractive optical elements are widely used in optical systems due to their excellent dispersion characteristics. Precision molding technology is an effective way to solve mass optical processing. Based on the precise molding of the chalcogenide glass diffractive optics, in this paper microstructure filling and process parameter sensitivity of diffractive optical elements are analyzed. The research results show that the use of appropriate process parameters can ensure the filling of diffractive microstructures. The cooling rate in the slow cooling stage is the most important factor affecting the surface shape.

It is known that there are obvious fly-back zone errors in the area of 2 1r phase resets of spatial light modulators(SLMs). It reduces the diffraction efficiency of the SLM, as a result, the accuracy of the wavefront modulation will be reduced. To reduce the fly-back zone error, this paper proposes a zoning variable module phase wrapping method based on the grayscale segmentation, which is marked as the module-n1 1r-n2 1r method. The experimental results show that the root-mean-square (RMS) value of the astigmatism term's deviation is from 0.0413 2 reduced to 0.0277 2, which proves that the proposed method can improve the reconstruction accuracy of the non-rotationally symmetric aberrations and can effectively reduce the fly-back zone error. Compared with the traditional module-2 1r method, the module-n1 1r-n2 1r method does not need to consider the 2 1r correction of the modulation depth, therefore, it is more flexible and convenient. With the improvement of the wavefront modulation accuracy of SLMs, it will play a more important role in adaptive interferometry for optical freeform surfaces.

衍射光学元件较球面、非球面光学元件在校正色差方面具备较大优势,尤其是在红外光学领域,应用衍射光学元件可进一步增加光学系统的设计自由度.随着红外光学市场的进一步增大,常规的衍射光学金刚石车削技术难以满足大规模需求,精密模压技术成为解决上述问题的关键技术.模具设计是实现精密模压的重点,为了缩减模具设计周期,该文采用有限元仿真方法对模具进行预先设计及补偿,并试加工.采用单站式精密模压机对设计的模具进行了精密模压试验.模压试验结果表明:采用合理的工艺参数,能够实现衍射光学元件面形精度PV达到0.56?μm,位置误差<0.011?mm,环带高度误差<0.12?μm,验证了仿真预先补偿在衍射光学模具设计中的有效性.

在光学加工领域,采用功率谱密度(power spectral density, PSD)对误差频谱方面信息进行表征,但是功率谱密度是表面误差统计信息,不如峰谷值 (peak-valley,PV)和均方根值(root mean square,RMS)直观。为了分析功率谱密度与工艺参数之间的关系,该文从PSD定义出发,分析了随机面形轮廓不同参数对光学PSD的影响规律,总结了PSD控制的要点,在平面玻璃上对数控抛光典型路径下加工的PSD曲线进行分析。分析结果表明:PSD与随机轮廓幅值、频率分布有关,相位对它几乎无影响;在RMS接近情况下,PSD线性拟合斜率和RMS Slope随随机轮廓的自相关长度增加而下降;短程加工路径相较于长程有序路径能够有效抑制PSD曲线峰值,使得光学元件符合频谱抑制要求。

According to the difficulty of cutting the ZTC4 material, slot cutting experiments were designed and three directional dynamic milling force were obtained. Instantaneous milling force model and multiple linear regression was used to analyze three directional milling force coefficients and edge milling force coefficients. To evaluate the performance of the dynamic milling force model, a new slot cutting experiment was designed. The comparison of simulations and experiments indicates the average milling force error are 5.74%, 3.93%, 7.98%, the dynamic milling force prediction model fits well in cycle, trend and amplitude. The feasibility and accuracy of the model for predicting the instantaneous milling force is verified.

为解决光电跟踪仪跟踪精度测量过程中光束大范围指向的模拟问题,设计了一种大口径、高精度二维快速控制反射镜(fast steering mirror, FSM)。采用微晶材料设计了长、短轴分别为230 mm和160 mm的椭圆形平面反射镜,面形精度优于λ/30。采用音圈电机驱动,通过柔性支撑铰链设计及DSP嵌入式控制系统,运动行程达到±30 mrad,运动控制精度达到5 μrad,运动控制线性度优于±0.20%,角分辨率优于1 μrad。通过软件控制,实现对入射光束圆形轨迹运动、直线轨迹运动、随机运动等形式的运动模拟。最后,对设计指标进行实际测试,可以满足跟踪精度光束动态模拟的测试需求。

It is known that the phase response of spatial light modulators (SLMs) measured by double-beam interferometers is sensitive to mechanical and environmental disturbances. This paper proposes a Shack-Hartmann wavefront sensor (SHWS) method to measure the phase response characteristics of the SLM. The results show that the phase modulation depth measured by the proposed method is 1.7581λ, and 1.7993λ by the Twyman-Green interferometer method. The difference in the phase modulation depth between the two methods is only 0.0412λ, and its relative error rate is 2.29%. It proves that the phase modulation accuracy obtained by the SHWS with lenslets of 73*73 used in this paper is equivalent to that of the Twyman-Green interferometer. Compared with the interferometer method, the SHWS method is simple, compact, and robust, has good real-time performance, and is relatively vibration insensitive. In the future, the SHWS method will play a more important role in the detection of the SLM's phase response.

针对铸造钛合金ZTC4材质的弱刚度细长梁结构件加工变形问题,借助有限元仿真方法对该加工过程进行分析,并根据仿真预测出来的零件变形量数据,结合镜像补偿加工的方法完成了试验验证.通过建立细长梁数控侧铣加工的三维有限元仿真模型,预测出零件本体在不同位置处的变形量范围,并以此为基础利用数控铣床进行试验验证.结果表明,无补偿的加工方式零件的表面质量差,而补偿加工后的零件表面,其平面度和直线度误差都有较大幅度的降低,下降幅度分别为17％和33％,从而确定了补偿加工的方式能够有效降低该弱刚度结构件的形状误差,提升其加工精度.

The primary mirror component is an important part of the Cassegrain system. As the first-stage imaging component, the RMS surface error directly affects the image quality of the whole optical system. In this article, taking the primary mirror component of a certain type of Cassegrain aerial camera as the research object, the factors affecting the RMS precision of the primary mirror surface are analyzed in detail from aspects of back supporting structure design, platen elastic crimping design, simulation analysis, test verification and so on. Using the finite element method to simulate the primary mirror supporting structure, analyzes the influence on the primary surface error by the three-point supporting structure in different positions. Furthermore, analyzes the variations of the primary mirror surface error under the influence of three-point supporting structure and pressure plate. The last but not the least, analyzes the primary mirror surface error under the different pressure conditions, concludes the optimal supporting point position and the excellent elastic compression. After the primary mirror assembling, through test verification, the RMS is 0.0270λ, which is better than the original design requirement of λ/35(0.0286λ). And the RMS variation between before and after assembling is less than 0.005λ. Performing the high and low temperature test on the primary component, after test, the RMS values is 0.0269λ, it proves that the primary frame structure and its axial supporting structure have little effects on the RMS precision of the primary mirror. It can also meet the requirement of the large-aperture primary mirror surface in the co-optical system under complex conditions. The feasibility of the structure design has been verified.

With the development of optical components towards low surface damage and low scattering characteristics, more and more attention has been paid to the surface integrity of optical components. Grinding is a common rough machining process for precision optical components, and its surface quality affects the subsequent polishing efficiency and the surface integrity of optical components directly. Therefore, in this paper, studies the grinding surface morphology of ZF62 optical glass material from many aspects such as grinding wheel modeling, surface formation mechanism, and abrasive movement analysis. The paper models the grinding wheel based on the power spectral density (PSD) of the grinding wheel surface, and verifies the effectiveness of the modeling method through experiments. Basing on analyzing the surface roughness with different grinding parameters, there are conclusions as follow: The modeling of the grinding wheel surface based on PSD could effectively simulate and analyze the grinding surface of the grinding wheel. Both the simulation experiment and the actual experiment show that the consistency of the trend. The surface roughness decrease with the increasing of the grinding speed and increase with the increasing of feed rate and the grinding depth.

In modern street battle, counter-sniper operations have become the main issue. However, due to the strong unidirectionality of laser beam, it is necessary to shape the laser beam to became useful. At the same time, in order to improve the detection efficiency, the energy of the laser beam is required to be as concentrated as possible, and the detection range is as wide as possible. Therefore, for meeting the requirements, comparing cylindrical with free-form surface prism on the shaping affection The result shows best shaping effect is achieved by using the free-form surface prism. In order to ensure that the laser energy loss is small, the manufracturing processing of freeform prism is analyzed. PSD(power spectral density) characteristics of the optical element surface and its influencing factors are discussed. So as to achieve the laser detection efficiency and detection distance requirements.

With the development of precision glass molding (PGM), low Tg glass molded lens are more and more used in optical system, recently, especially in the fields of safe security and car assist system, which have large market demand. Coating technology for mold is one key of support technology for precision glass molding, and the researches on the coating for precision low Tg glass molding is urgently needed. In this paper, aiming at the coating technical demand of low Tg glass molding, the coating duration and damage principal are discussed after fast coating facility testing. Three kinds of coating system (WxCy-PtIr-D_ZK3,WxCy-CrAlN-D_ZK3, WxCy-TiAlN-D_ZK3)for molding are analyzed with SEM. The results show the PtIr alloy coating is suit for low Tg glass precision molding.

Diffractive optical elements (DOEs),with their excellent optical properties,can modulate the ideal wavefront,and have greater advantages in correcting chromatic aberration than spherical or aspherical optical systems.The difficulty in the processing of DOE lies in the fact that its processing accuracy requires not only that the surface shape of the aspherical substrate satisfies the accuracy requirements,but also that the phase saltation position and the height of the diffractive structure satisfy the requirements.Due to the discontinuity of the surface and the phase saltation position,the traditional detection method is difficult to meet the requirements.The detection error source of the profiler was analyzed,and the machining error data was analyzed in combination with the detection data.Based on this,the data processing was performed.The error data obtained by this method was applied to the part processing,and the surface shape error of the 120 mm diffractive surface was 0.539 μm.