微系统技术是后摩尔时代延续摩尔定律重要的解决途径,能够满足电子装备对小型化、多功能电子系统的迫切需求.由于国内外基础工业条件及布局存在较大差异,无法将国外微系统技术路线全盘复制,应立足国内集成电路产业及封测产业的现状,走适合中国国情的自主可控技术路线.本文从微系统产品设计、制造及测试的研制流程出发,重点对微系统设计仿真、先进封装和集成测试等方面的关键技术展开研究,形成了 自主创新的关键技术解决思路,并提出了微系统的未来发展预判.

对一种典型2.5D封装结构在回流焊工艺过程的热应力进行仿真.通过对比分析传统热力学仿真方法与基于生死单元技术的热力学仿真方法,研究了计算方法对热应力计算结果的影响.在相同参考温度下,由不同计算方法得到的硅通孔(TSV)转接板应力结果相差不大,从焊球应力结果可推测出,基于生死单元技术的热力学仿真方法考虑了残余应力的累积模拟更适合于回流焊过程的热应力仿真.研究了2.5D封装回流焊过程中参考温度的选择对计算结果的影响,选用最高参考温度作为各个组件的参考温度,通常得到TSV转接板的应力值偏大,模拟的结果会更加偏于激进.通过对2.5D封装结构回流焊过程进行热应力分析,对比分析了计算模拟方法和参考温度的选择对最终计算结果的影响.该方法同样可用于指导其他同类2.5D封装结构应力的计算和分析.

研究依托硅通孔实现信息处理微系统的技术.概述了传统信息处理系统小型化集成实现方式及新需求下所面临的发展瓶颈,依托"拓展摩尔定律"(More than Moore)战略成为信息处理系统具备高密度、多功能、多工作模式能力的重要实现方式,硅通孔TSV(Through Silicon Vias)为上述需求提供了重要的支撑手段;着重阐述了信息处理类微系统的优势和设计、实现、测试等方面的关键技术,并展示了已实现的多种信息处理微系统产品组成形态,最后对信息处理微系统产品的应用前景进行了展望,阐述了关键技术对信息处理微系统实现支撑的优越性.

Affected by Sino-US international relations, it may be difficult to make breakthroughs in integrated circuit manufacturing processes for a period of time. At the same time, Advanced semiconductor technology will bring high integrated circuit development costs, which is no longer suitable for the development needs of military information processing. Information processing micro-systems can integrate various mature technologies at the micro-nano scale. Through system optimization design, the information processing micro-systems can get rid of the restriction of the generation difference of semiconductor technology and device to a certain extent. Therefore, on the premise of improving the quality level, the development cycle is greatly shortened, and the problems of independent controllability and development efficiency of equipment are solved. In this paper, the current research status of information processing micro-system technology at home and abroad is investigated. The characteristics of the technology are summarized. The challenges faced by information processing micro-systems are analyzed from the aspects of interconnection interface and protocol, packaging technology, quality control, etc. The research trend of information processing micro-systems is prospected from the four aspects of design, process, test and reliability. Finally, development suggestions are put forward.