Efficient acquisition of spatial airflow information is vital for organisms to orient within complex environments and detect predators. For scorpions with degraded vision, specialized mechanosensory trichobothria provide a crucial vision-compensatory mechanism, enabling hypersensitive perception of subtle airflow fluctuations. Inspired by this evolutionary adaptation, we present a biomimetic neuromorphic airflow sensor (BNAS) integrating a bioinspired lever-amplification structure with a pressure-induced ionic enrichment mechanism. This synergistic design inherits the hypersensitive anemosensation and neural response features of scorpion. The BNAS demonstrates a superior sensitivity of 18.22% (m/s)-1 at low velocities and maintains high performance across a broad dynamic range (0.1 to 10.27 m/s), along with omnidirectional detection capability. The integration of this neuromorphic hardware with AlexNet deep-learning algorithm enables the efficient extraction of human respiratory patterns, achieving 95.56% accuracy in identifying individual "breathing fingerprints." Our work underscores the potential of bioinspired neuromorphic systems to bridge the gap between biological perception and artificial sensing, establishing a neuromorphic front-end design paradigm that advances next-generation brain-inspired computing.
Carbon fiber reinforced epoxy resin (CF/EP) composite material has become a key lightweight manufacturing material in aerospace and other fields due to its outstanding properties such as high specific strength and high specific modulus. However, its low interlaminar strength and anisotropy lead to defects like delamination, burrs, and tears during secondary processing. Although ultrasonic vibration-assisted milling is feasible, the influence of ultrasonic process parameters on the processing effects of CF/EP composite material with different fiber orientation angles (FOA) remains unclear. Therefore, this research employs a combined finite element simulation and experimental approach to compare the processing effects of conventional milling (CM), longitudinal ultrasonic vibration milling (LUVM), and longitudinal-torsional ultrasonic vibration milling (LTUVM) on CF/EP with FOA of 0°, 90°, and 45°. Results indicate that ultrasonic vibration milling significantly outperforms CM, altering the fiber fracture pattern, with LTUVM demonstrating the most effective results. The longitudinal-torsional composite vibration of LTUVM differentially modulates the dominant failure modes for different fiber orientation angles: at 0°, the torsional component provides lateral shear to suppress fiber pull-out; at 90°, the longitudinal impact accelerates bending fracture; and at 45°, the composite trajectory dynamically optimizes the fiber shear angle, thereby overcoming the limitations of single-axis longitudinal vibration regarding sensitivity to fiber orientation. In terms of milling force, LTUVM further reduces force by 8–17% compared to LUVM across different fiber angles, with the greatest reduction of up to 13% observed at 90° FOA. Regarding processing temperature, LTUVM achieves an additional 11–13% reduction compared to LUVM, with the most significant cooling effect observed at 45° FOA. Observations of top and bottom edge damage reveal that LTUVM significantly reduces fiber pull-out length through combined longitudinal-torsional vibration, resulting in the shortest edge burrs and nearly eliminating layering defect. Surface morphology analysis indicates that the surface roughness values under LTUVM are reduced by 24–38% compared to LUVM, with fewer surface defects and more uniform resin smearing. This research analyzes the processing effects of LTUVM on CF/EP composite material with different FOA, providing theoretical basis and process references for high-quality processing of carbon fiber composites.
Exhaled breath condensate (EBC) analysis, a promising noninvasive respiratory monitoring method, has emerged as a pivotal technique for assessing the health status of patients with respiratory disorders and is widely used in clinical research and daily health management. However, conventional analytical methods face challenges in real-time in situ detection of physicochemical indicators and active EBC collection in a power-free way. Herein, a wearable multimodal detection system (WMDS) with efficient collection and real-time analysis of EBC is developed. Specifically, the WMDS consists of a bio-inspired collector, an electrochemical sensor (EBC analysis), a respiratory sensor (humidity and respiratory rate), a temperature sensor, and a flexible printed circuit board. The miniature-sized collector with a cactus spine-like structure can actively harvest 4.1 μL of EBC within 1 min without power consumption. Leveraging self-developed sensors and wireless data transmission circuitry, the WMDS enables real-time in situ monitoring of multimodal EBC analytes (hydrogen peroxide, nitrite, urea) and respiratory parameters (temperature, humidity, and rate). Remarkably, the WMDS exhibits dual-range detection capability covering both physiological and pathological conditions: the low-concentration range of 0-500 μmol/L is applicable for routine health monitoring and early disease screening, with detection limits (LODs) of 0.209, 0.155, and 0.573 μmol/L and sensitivities of 2.7 × 10-2, 3.4 × 10-2, and 9.0 × 10-3 μA/(μmol/L) for EBC analytes; the high-concentration range exceeding 500 μmol/L is designed for severe pathological condition detection, where LODs and sensitivities are 302.2, 278.7, 325.2 μmol/L and 1.9 × 10-2, 1.3 × 10-2, 3.9 × 10-3nA/(μmol/L) respectively. As a proof-of-concept, the WMDS is applied to on-body respiratory monitoring, validating its potential application in real-time in situ health monitoring.
Real-time, non-invasive biofluid monitoring is pivotal for precision medicine. However, conventional wearable sensing systems are constrained by their reliance on passive sampling, as well as barriers to design and fabrication. Integrating active sweat extraction with reliable enzyme-free multimodal sensing remains a critical challenge in wearable electronics. Herein, we report a wearable sweat monitoring system (WSMS) featuring a programmable metabolic flux sampling strategy, enabling precise and on-demand regulation of perspiration rates. By synergizing active thermal induction with microfluidic quantitative transport, the WSMS achieves controlled sweat rates in the range of 0.1-4 μL min-1·cm-2, with a maximum inducted sweat flux of 6.3 μL min-1·cm-2. This active sampling module is integrated with an enzyme-free electrochemical sensor array for the simultaneous detection of glucose, uric acid, and pH, exhibiting superior detection limits of 6.79 μM, 0.16 μM, and 1.3 pH units, respectively. More importantly, we demonstrate a laser-engraving manufacturing process capable of fabricating large-area sensor arrays (6 m × 0.5 m, ∼1340 units) within 4 h, bridging the gap to commercial scalability. Human subjects validation confirms the ability of the WSMS to accurately track sweat metabolites in both sedentary and exercise states. This work establishes a scalable, active-sensing paradigm that overcomes the limitations of passive environmental triggers, paving the way for non-invasive health monitoring and early diagnosis.
As wearable technologies continue to advance, the need for flexible temperature sensors that can not only detect subtle thermal changes but also respond independently to dangerous heat levels has grown more urgent. Drawing inspiration from nature─specifically, the extraordinary sensitivity of slit sensilla in scorpions and the petal-opening behavior of gentian flowers in response to heat─we have developed a flexible, bioinspired temperature sensor capable of both high-resolution detection and self-triggered thermal alerts. The sensor adopts a bilayer heterogeneous architecture, consisting of a poly(ethylene oxide) (PEO)-graphene-based temperature-sensitive ink layer and a crack-based polylactic acid (PLA) layer. The ink layer exhibits excellent temperature sensitivity in the low-temperature range (30-40 °C), achieving a high sensitivity of up to 5.1% °C-1, while the cracked PLA layer operates effectively in the high-temperature range (40-70 °C) through a synergy of thermal bending and tunneling effects, delivering a sensitivity of up to 0.146% °C-1. Integrated into a system, the sensor rapidly responds to sudden temperature spikes, triggering a safety alert in just 11.27 s. By harmonizing bioinspired design with functional engineering, this sensor not only supports conventional wearable temperature monitoring but also provides reliable protection in abnormal high-temperature conditions, demonstrating broad application potential in smart wearables, intelligent workplaces, and fire warning systems.
High-performance flexible pressure sensors have found extensive applications in critical areas such as flexible robotics, brain-machine interfaces, wearable electronics, and human-machine interaction systems. These applications necessitate not only a broad detection range for mechanical signals but also sustained high sensitivity throughout the entire pressure range. Nevertheless, flexible materials typically suffer from limited compressibility and structural saturation under high loads, resulting in a precipitous decline in sensing sensitivity across a wide pressure range and impeding their practical deployment. Drawing inspiration from the structural and material attributes of the human fingertip, a flexible ionic capacitive pressure sensor based on a multilevel rigid-soft coupled architecture has been designed. The proposed design substantially augments the sensor's load-bearing capacity and extends its pressure detection range. Meanwhile, the electric double-layer (EDL) effect formed at the surface of the ionic dielectric polymer film triggers significant capacitance variations under small applied pressures, thereby further enhancing the sensing sensitivity. The results demonstrate that the sensor attains an exceptionally high sensitivity of up to 2190.0 kPa(-1) in the low-pressure regime (<8 kPa), while preserving an outstanding sensitivity of 155.4 kPa(-1) under high pressure (800 kPa). Additionally, the sensor exhibits a rapid response time of 18 ms. To substantiate its performance, the sensor was deployed in several practical scenarios, encompassing human motion detection, foot-type classification based on plantar pressure distribution, and human-machine interaction control systems. This work is anticipated to offer a crucial reference for fostering the synergistic development of pressure sensors towards achieving both high sensitivity and wide pressure range detection.
Radiative cooling (RC) has emerged as a compelling energy-free solution for passive thermal management by dissipating heat into cold outer space through the atmospheric window. While recent advances have significantly optimized spectral performance, the field is now shifting toward the simultaneous realization of high solar reflectance, superior thermal emittance, long-term environmental durability, and scalable manufacturing under realistic service conditions. Natural organisms, having evolved sophisticated thermoregulatory strategies over millions of years, provide ideal blueprints for addressing these multi-objective challenges through the synergy of biological feature architectures and intrinsic material properties. This review systematically analyzes biological thermoregulation strategies and their underlying physical principles by categorizing natural archetypes into one-dimensional fibrous structures, two-dimensional surface gratings or scales, and three-dimensional porous networks or hierarchical architectures. We clarify how specific optical mechanisms are integrated within these biological architectures to achieve precise radiative control across the electromagnetic spectrum. Furthermore, the translation of these natural principles into engineered materials is discussed across diverse sectors, including personal thermal management and atmospheric water harvesting. By identifying persistent bottlenecks and future research trajectories, this review establishes a strategic framework for developing next-generation, bioinspired RC technologies capable of meeting global cooling demands with enhanced functional reliability and broad application potential.
Flexible pressure sensors have garnered extensive attention in wearable medical applications due to their stretchability and conformability to curved surfaces. However, limitations in sensitivity and measurement range can compromise their responsiveness to both subtle pressure variations and broader pressure ranges. Optimizing the sensing layer structure of the sensor can improve stress distribution and enhance overall performance. An innovative hierarchically responsive pyramid microstructure array sensor is designed in this study. Using high-precision 3D-printed molds, the sensor was manufactured with polydimethylsiloxane (PDMS) as the substrate material. Experimental results demonstrate that the sensor achieves high sensitivity (0.0741 kPa−1) in the low-pressure regime (0–15 kPa) while maintaining excellent linearity (R2=0.98) in the high-pressure range (15–90 kPa). Remarkably, the device exhibits fast response characteristics with 40 ms response time and 34 ms recovery time. This advancement provides a potential solution for human motion analysis and pathological detection applications.
Nickel-based superalloys, renowned for their exceptional high-temperature strength, oxidation resistance, and corrosion resistance, have become essential materials in the aerospace, defense, and nuclear industries. However, due to their poor machinability, common cutting processes often result in poor surface quality, difficulties in chip breaking, and significant tool wear. This study investigates the surface integrity of nickel-based superalloys during ultrasonic elliptical vibration cutting. The effects of various process parameters on the surface roughness, residual stress, and microhardness are systematically analyzed. The results indicate that under ultrasonic elliptical vibration cutting conditions, the surface roughness of the workpiece increases with the ultrasonic amplitude, cutting depth, and feed rate. It initially decreases and then increases with cutting speed, and decreases with an increase in the tool tip radius. The post-cutting residual stress in the nickel-based superalloy decreases with higher cutting speed and ultrasonic amplitude, but increases with greater cutting depth and tool tip radius. The surface microhardness increases with the cutting speed up to a point, after which it decreases, while it significantly increases with a higher ultrasonic amplitude, feed rate, and cutting depth. A comparative experiment was conducted between ultrasonic elliptical vibration and conventional cutting. The research results showed that when the cutting depth was 2 µm, the surface roughness and wear decreased by 19% and 53%, respectively, and the residual compressive stress and microhardness increased by 44% and 21%, respectively. This further verified the significant advantages of ultrasonic elliptical vibration cutting in optimizing machining performance.
SiC/SiC composites are widely used in aerospace, nuclear industry, and automotive due to the excellent properties of high strength, hardness, and oxidation resistance. However, the high brittleness and hardness of SiC/SiC composites show great difficulty for machining. In this work, A finite element simulation model of 3D single-grit cutting was established to analyze defect formation and internal crack length evolution during material removal in different ultrasonic amplitudes. The relationship of ultrasonic amplitude and maximum undeformed chip thickness was analyzed based on abrasive trajectory. The ultrasonic vibration-assisted helical grinding (UVHG) technology was used to conduct SiC/SiC composites micro-hole, and morphology and roughness of micro-hole in different orientation were observed. From the results of simulation, the mechanism of abrasive grain removal of fibers was changed by ultrasonic vibration, and crack propagation in the silicon carbide matrix was suppressed during machining, which were beneficial to reduce the defects. Moreover, the experimental results showed that the surface roughness decreased from 1.632 mu m to 1.172 mu m as the amplitude rises from 0 mu m to 8 mu m, and the minimum damage width in exit hole was 24.3 mu m when the amplitude was 8 mu m. Therefore, this study could be a prospective method for the fabrication of micro-hole of SiC/SiC composites or even other features.
C/SiC composites exhibit outstanding mechanical properties, including high stiffness and low density. They have a widespread range of applications in aerospace and defense industries. However, due to the structural characteristics and mechanical properties of C/SiC composites, conventional machining (CM) is prone to inducing damage defects such as voids and cracks. This results in machined parts that often fail to meet the performance requirements necessary for use in extreme environments. In this paper, laser-ultrasonic hybrid machining (L-UHM) technology is employed to enhance the machining quality of C/SiC composites. The thermal modification and material removal mechanisms of C/SiC composites in the hybrid energy field are investigated. A fracture energy model under the laser-ultrasonic hybrid effect is established. The stress distribution characteristics and crack extension under three typical fiber directions are analyzed by using micro-machining finite element model (MM-FE model). The results demonstrate that C/SiC composites are removed in the manner of micro-brittle failure in L-UHM under three typical fiber directions. Furthermore, the failure behavior of the carbon fiber and SiC matrix in L-UHM is studied by combining the cutting force, chip morphology, and surface defects. Compared with CM and laser-assisted machining (LAM), L-UHM significantly suppresses stress concentration and crack extension, while reducing cutting forces, chip size, and surface roughness. This study offers novel insights into the removal mechanism of C/SiC composites during L-UHM. It can serve as a theoretical foundation for high-quality and efficient processing for critical C/SiC composites components.
Mechanical information is a medium for perceptual interaction and health monitoring of organisms or intelligent mechanical equipment, including force, vibration, sound, and flow. Researchers are increasingly deploying mechanical information recognition technologies (MIRT) that integrate information acquisition, pre-processing, and processing functions and are expected to enable advanced applications. However, this also poses significant challenges to information acquisition performance and information processing efficiency. The novel and exciting mechanosensory systems of organisms in nature have inspired us to develop superior mechanical information bionic recognition technologies (MIBRT) based on novel bionic materials, structures, and devices to address these challenges. Herein, first bionic strategies for information pre-processing are presented and their importance for high-performance information acquisition is highlighted. Subsequently, design strategies and considerations for high-performance sensors inspired by mechanoreceptors of organisms are described. Then, the design concepts of the neuromorphic devices are summarized in order to replicate the information processing functions of a biological nervous system. Additionally, the ability of MIBRT is investigated to recognize basic mechanical information. Furthermore, further potential applications of MIBRT in intelligent robots, healthcare, and virtual reality are explored with a view to solve a range of complex tasks. Finally, potential future challenges and opportunities for MIBRT are identified from multiple perspectives.
Titanium alloys (Ti-6Al-4V) are widely used in the aerospace field. However, as a typical difficult-to-machine material, titanium alloys have a low thermal conductivity, a high chemical activity, and a significant adiabatic shear effect. In conventional milling (CM), the temperature in the cutting zone rises sharply, leading to tool adhesion, rapid wear, and damage to the workpiece surface. This article systematically investigated the influence of process parameters on the surface roughness, cutting force, and cutting temperature in the ultrasonic-vibration-assisted milling (UAM) process of titanium alloys, based on which multi-objective optimization process of the milling process parameters was conducted, by utilizing the grey relational analysis method. An orthogonal experiment with four factors and four levels was conducted. The effects of various process parameters on the surface roughness, cutting force, and cutting temperature were systematically analyzed for both UAM and CM. The grey relational analysis method was employed to transform the optimization problem of multiple process target parameters into a single-objective grey relational degree optimization problem. The optimized parameter combination was as follows: an ultrasonic amplitude of 6 μm, a spindle speed of 6000 rpm, a cutting depth of 0.20 mm, and a feed rate of 200 mm/min. The experimental results indicated that the surface roughness Sa was 0.268 μm, the cutting temperature was 255.39 °C, the cutting force in the X direction (FX) was 5.2 N, the cutting force in the Y direction (FY) was 7.9 N, and the cutting force in the Z direction (FZ) was 6.4 N. The optimization scheme significantly improved the machining quality and reduced both the cutting forces and the cutting temperature.
The waterjet-assisted laser processing (WJALP) technology has a significant effect in reducing the damage to the workpiece caused by laser ablation. While, due to the limitation of the depth-of-field (DOF) of the microscopic magnification system, the processing quality and features of the material surface cannot be accurately identified during processing. In multi-focus image fusion (MFIF) according to different DOF images, the conventional wavelet transform in the condition of waterjet cannot accurately provide detailed features of microscopic images. In this work, in order to overcome the shortcomings of traditional wavelet transform, the method of discrete wavelet transform (DWT) based on the human vision principle (HVP) was proposed, and stretched the detail part while fully retained the source image information. Based on morphological theory and defogging algorithm, the waterjet interference was excluded by image pre-processing as much as possible. The approximate component and detailed component were obtained by DWT, and the detailed components were stretched utilizing HVP according to the brightness and darkness provided by the approximate component. Finally, the image brightness was adjusted using an adaptive gamma correction. According to the experimental results, in the case of complex flowing water films, SD , E ( F ), AG , and SF can reach 75.45%, 95.38%, 73.60%, and 77.45% of the ideal fusion, respectively, which indicated that the proposed method can achieve a better fusion effect in different waterjet situations.
Smart microstructured surfaces have attracted extensive attention in recent years, because the surface microstructure morphology can be tuned using an external field to change the wettability. Inspired by the surface microstructures of butterfly wings, a tilted array microstructure was fabricated on the surface of NiTi shape memory alloy (NiTi-SMA) using wire electrical discharge machining (WEDM). The modified surface with fluorosilane showed superhydrophobicity and anisotropic droplet sliding. As the shape of the tilted microarray structure could be repeatedly switched between the original shape and deformation under the action of force and heat, the contact angle of the surface was repeatedly switched between 155.9 degrees +/- 0.2 degrees and 150.3 degrees +/- 0.3 degrees , and the anisotropic sliding angle of the surface was repeatedly switched between 7.9 degrees +/- 1.6 degrees and 22.9 degrees +/- 1.3 degrees , and 19.6 degrees +/- 0.6 degrees and 53.4 degrees +/- 2.9 degrees. The range of switchable anisotropic sliding could be adjusted by changing the microstructure spacing L. In addition, the surface of the tilted microarray structure showed a directional water transport ability under the action of vibrations, and the directional transmission of water droplets could be selectively controlled by changing the morphology of the surface microstructure. Therefore, a smart surface with switchable wettability was realized on the NiTi-SMA surface, providing a new method to realize the smart control of droplets on smart microstructured surfaces.
The introduction of ultrasonic vibration had a significant effect on the expansion tendency of sub-surface microcracks, but the reason for influencing the expansion tendency of microcracks is not clear. In this study, the vertical ultrasonic vibration cutting process of sapphire was simulated by the discrete element method, and the reasons for the expansion of sub-surface microcracks during the cutting process were revealed from the viewpoint of cutting force and stress. The results of the study show that the sub-surface microcracks in the cutting process are mainly caused by tensile stresses, and the tensile stresses increase with the increase of amplitude and frequency; as the amplitude and frequency increase, the degree of cutting force fluctuation, the depth of the sub-surface cracks, and the number of cracks increase more drastically; the tensile stress at smaller amplitudes is smaller than in normal cutting, and the location of the maximum tensile stress is closer to the machined surface, which inhibits the expansion of the sub-surface cracks. Finally, the vertical ultrasonic vibratory cutting and normal cutting sapphire experiments were comparatively studied, and the experimental results were in agreement with the simulation results. This research provides theoretical guidance for the realization of low damage and efficient processing of sapphire materials.
With the gradual improvement of the speed of aircraft and automobiles, in order to ensure their safe braking, the requirements for new brake materials and the demand for processing methods are becoming more and more urgent. SiC/SiC composites have drawn a lot of interest because of their exceptional qualities, including high strength, high thermal stability, and low density. The goal of this study is to compare traditional helical grinding (CHG) with ultrasonic vibration aided helical grinding (UVAHG). The ABAQUS finite element simulation model of single abrasive cutting of UVAHG and CHG was established to analyze the stress distribution on the material under different processing methods. It can be seen from the experimental results that the effect of ultrasonic vibration can significantly improve the stress concentration and crack propagation defects during the machining process of the workpiece, and the surface quality of the machined surface has also been improved.
High strength, high stiffness, low density, low thermal expansion coefficient, etc., are all characteristics of C/SiC composites, but fiber extraction, matrix cracks and burrs are prone to occur during processing which make it difficult for the parts to meet the requirements of high precision and quality. Laser-ultrasonic hybrid micromachining (L-UHM) is a recent research hotspot and has been shown to have a positive impact on the machining quality of ceramic matrix composites. The research focuses on L-UHM’s effects on the processing of C/SiC composites at various fiber orientations. Through the analysis of the temperature field simulation of laser parameters on the effect of heat affected zone (HAZ), and conventional machining (CM) and L-UHM orthogonal micromachining models were established to investigate how two alternative fiber direction cutting circumstances affect the failure mode of C/SiC composites. The findings indicate that compared with CM, LUHM significantly improves the surface quality both in the vertical longitudinal fiber direction and the parallel fiber direction. When $\mathrm{P}=60\mathrm{W}/\mathrm{m}\mathrm{m}^{2}$ and $\mathrm{A}=6\mu \mathrm{m}$, respectively, the surface roughness is reduced by 29.9 % and 35.3 %, respectively.
Glow discharge polymer (GDP) is the target of choice for ICF ignition due to its low density, dense structure, absence of grain boundary defects, infrared transparency and high surface finish, which can effectively reduce the initial perturbation of the implosion process and thus suppress RT instability during ICF implosion. In the process of ignition, in order to ensure that the energy of the ignition laser can be deposited near the compressed fuel core, specific microstructures need to be machined on the surface of the target pellet and relatively high requirements are placed on the surface quality of these microstructures. In recent years, laser ablation techniques have been widely used for the micro and nano processing of polymers due to their ability to produce precise microstructures. In this paper, laser processing experiments were conducted on GDP materials, and the processed surfaces were observed using scanning electron microscopy (SEM). Variations in processing parameters were used to obtain the effect of laser ablation on the surface morphology of GDP materials. With an increase in laser energy density, the surface quality of the GDP material decreased, and the heat-affected zone became larger.As the scanning speed increases, the surface quality of the GDP material improves and the heat-affected zone becomes smaller. As the number of scans increases, the surface quality of the GDP material can be maintained at lower scan rates, and then starts to decrease as the number of scans increases further.
Waterjet-assisted laser direct inscription (WJALDI) technology has presented a positive effect to alleviate the thermal damage in workpieces caused by laser ablation. This research pays attention to the effect of aqueous media on the microstructure evolution and phase composition of materials during laser ablation, and few relevant researches have been reported. In this work, titanium alloy (TC11) was applied to fabricate microgrooves utilizing WJALDI and laser direct inscription in the air (LDI). The interaction effects between the laser, water, and the material within a complete ablation cycle were analyzed in depth. The geometry and thermal damage region were observed and discussed to prove the machining performance. The microstructure evolution that happened on and underneath the microgroove surface was also studied. The results revealed that the effect of cooling and impacting significantly reduced the accumulation of debris and molten metal, and better processing quality was obtained in WJALDI. According to the analysis of electron backscattered diffraction (EBSD), the grain refinement of the inner material was alleviated, low-angle grain boundaries with the features of uniform distribution were generated, and the adjacent grains of α phase have small kernel average misorientation. In addition, compared with LDI, WJALDI offered a wide microgroove with a small size of heat affected zone (HAZ) and thin thickness of the recast layer, while less depth. Therefore, the developed technology in this work could be a promising approach for the micromachining of titanium alloy or even other difficult-to-cut materials with high quality.