The exponential data size growth in high-speed networks is a key motivator for nonvolatile memory development. To support this demand, higher density NAND is required: with a smaller cell size and higher interface speed. Generally, scaling down NAND technology requires addressing several common issues: 1) As the number of WL stack layers increases, the cell-string current is reduced due to the increased resistance in a cell string, 2) Deterioration of cell-to-cell interference, due to the reduction of cell pitch, 3) Support of higher IO bandwidth for faster data transfer speed [1]. Another challenge of this work was to minimize the die size because the peripheral circuit area is comparable to that of the cell array. Hence, we integrated the peripheral circuits below the cell array as introduced in [2]. Also, to cope with lower metal-contact height, a novel structure for the capacitor device was used to maximize capacitance per unit area.

NAND flash memory is widely used as a cost-effective storage with high performance [1–2]. This paper presents a 128Gb multi-level cell (MLC) NAND flash memory with a 150 cells/string structure in 14nm CMOS that can be used as a cost-effective storage device. This paper also introduces several approaches to compensate for reliability and performance degradations caused by the 14nm transistors and the 150 cells/string structure. A technique was developed to suppress the background pattern dependency (BPD) by applying a low voltage to upper word lines (WLs) - the drain side(SSL side) WLs with respect to the location of the selected WL - during the verify sequence. Two techniques are also used to improve the program performance: equilibrium pulse scheme and smart start bias control scheme (SBC) in the MSB page. In addition, the first cycle recovery (FCR) of read enable (RE) and the bi-directional data strobe (DQS) is used to achieve a high speed I/O rate. As a result, a 640µs program time and a 800MB/s I/O rate is achieved.

A monolithic 64 Gb MLC NAND flash based on 21 nm process technology has been developed. The device consists of 4-plane arrays and provides page size of up to 32 KB. It also features a newly developed asynchronous DDR interface that can support up to the maximum bandwidth of 400 MB/s. To improve performance and reliability, on-chip randomizer, soft data readout, and incremental bit line pre-charge scheme have been developed.