Compact parallel transmitters and receivers with an aggregate capacity of 107 Gb/s are built through hybrid integration of arrays of ten 100-GHz spaced directly modulated lasers, arrays of ten avalanche photodiodes, and high-index contrast silica arrayed waveguide grating multi- and demultiplexers. Unamplified transmission over 75 km of standard single-mode fiber and 155-km amplified links is demonstrated in the C-band, by using a modulation format based on spectral offset filtering and electronic dispersion compensation.

Electrically tunable membranes with controllable permeability have been experimentally demonstrated by combining nanostructured and microstructured superhydrophobic surfaces with the phenomenon of electrowetting. Electrowetting allows dynamical tuning of the contact angle that the liquid forms with the membrane nanofeatures and microfeatures, thus controlling the flow of the liquid through the membrane and, therefore, tuning the permeability of the entire structure. “Smart” electrochemical energy storage cells that can be activated on demand have been built by combining these membranes and microfabricated Zn∕MnO2 electrodes. A typical open-circuit voltage of 1.55V and capacity of 200μAh∕cm2 have been demonstrated.

An ultra high-density hybrid integration for micro-electromechanical system (MEMS) mirror chips with several thousand inputs/outputs has been developed. The integration scheme involving flip-chip assembly provides electrical signal to individual mirrors, which is compatible with postprocessing steps of selectively removing the silicon handle and releasing the MEMS mirrors. For the first time, to our knowledge, solder deposition and flip-chip bonding of 3-mu m bumps on 5-mu m centers of a large array has been demonstrated.

This paper describes an optical configuration that allows effective arrangement of multiple 1 x N optical switches as an integrated array. An experimental compact module of 16 arrayed 1 x 8 optical switches, built by utilizing a cylindrical lens, achieves uniform performance and a mean fiber-to-fiber insertion loss of 2.75 dB,. This paper also discusses various layouts that use the proposed optical switching module for both wavelength-independent and wavelength division multiplexing (WDM) applications.

Electrostatically driven MEMS devices commonly operate with electric fields as high at 10/sup 8/ V/m applied across the dielectric between electrodes. Even with the best mechanical design, the electrical design of these devices has a large impact both on performance (e.g., speed and stability) and on reliability (e.g., corrosion and dielectric or gas breakdown). In this paper, we discuss the reliability and performance implications of leakage currents in the bulk and on the surface of the dielectric insulating the drive (or sense) electrodes from one another. Anodic oxidation of poly-silicon electrodes can occur very rapidly in samples that are not hermetically packaged. The accelerating factors are presented along with an efficient early-warning scheme. The relationship between leakage currents and the accumulation of quasistatic charge in dielectrics are discussed, along with several techniques to mitigate charging and the associated drift in electrostatically actuated or sensed MEMS devices. Two key parameters are shown to be the electrode geometry and the conductivity of the dielectric. Electrical breakdown in submicron gaps is presented as a function of packaging gas and electrode spacing. We discuss the tradeoffs involved in choosing gap geometries and dielectric properties that balance performance and reliability.

This paper describes the subsystem design and performance of a 256 x 256-port micromechanical beam-steering optical cross-connect with 1.33-dB average loss, which can provide 238 x 238-port cross-connect with a maximum loss of less than 2 dB. This paper describes the design chosen and analyzes the tolerance ranges required to produce low loss and simulate the expected loss distribution of the fabric. The method of establishing and testing the connections is also described. The simulation is compared with the measured system, and the expected and measured static and dynamic crosstalk are compared.

This paper, describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 x 256-and 1024 x 1024-port large optical, cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OCX fabrics.

As telecom networks increase in complexity there is a need for systems capable of manage numerous optical signals. Many of the channel-manipulation functions can be done more effectively in the optical domain. MEMS devices are especially well suited for this functions since they can offer large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of Optical Cross Connects, WDM spectrum equalizers and Optical Add-Drop multiplexors based on different fabrication technologies such as polySi surface micromachining, single crystal SOI and combination of both. We show specific examples of these devices, discussing design trade-offs, fabrication requirements and optical performance in each case.

This letter describes a 238/spl times/238 beam-steering optical cross connect constructed using surface micromachined mirrors. Its innovative optical configuration resulted in superior optical performance, achieving a mean fiber-to-fiber insertion loss of 1.33 dB and a maximum insertion loss for all 56 644 connections of 2 dB.

We present a microelectromechanical systems-based beam steering optical crossconnect switch core with port count exceeding 1100, featuring mean fiber-to-fiber insertion loss of 2.1 dB and maximum insertion loss of 4.0 dB across all possible connections. The challenge of efficient measurement and optimization of all possible connections was met by an automated testing facility. The resulting connections feature optical loss stability of better than 0.2 dB over days, without any feedback control under normal laboratory conditions.

Summary form only given. It has been demonstrated that large-scale transparent optical switches can be built using micro-electro-mechanical systems (MEMS) technology. An added advantage of transparent switches is that the switching function is independent of data rate and data format. In this paper, we discuss a three-dimensional MEMS optical crossconnect (OXC) switch fabric, with a focus on the optical performance.

The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.

A 72 x 72 wavlength-selective crossconnect switch that is scalable to 1296 x 1296 with current technology is presented. Silica-on-silicon wavelength multiplexers with integrated monitoring tops and a MEMS micromirror array were assembled in a hybrid 3-D beam steering crossconnect having 20dB insertion loss, 100GHz channel spacing. and 30GHz passbands.