了解等离子体阻抗在磁控溅射放电过程中的变化规律,有利于调控电源和负载之间的阻抗匹配,达到最大化利用溅射功率,提高镀膜质量的目的.为了研究磁控溅射镀膜工艺过程中等离子体的阻抗特性的变化趋势,本文采用V-I probe测量等离子体阻抗大小、极板负偏压等参数,研究了气体流量和溅射功率对等离子体阻抗特性的影响.结果表明,在本文的实验条件下,等离子体始终呈现为容抗特性.当气体流量增大时,受氩气的电离率影响,等离子体阻抗实部R呈现先增大后减小的趋势,阻抗虚部X受到鞘层的影响呈现先减小后增大的趋势.当溅射功率增大时,等离子体阻抗实部R受欧姆加热的影响一直增大,阻抗虚部X受到负偏压和鞘层的影响逐渐减小.

为了估计整车质量,将MEMS传感器嵌入轮胎内部,以此获取轮胎的径向加速度、轮胎压力及温度等状态信息,再结合车速信息构建轮胎载荷与接地印痕长度的算法模型.基于轮胎径向压力动态特征估算接地印痕长度,利用已构建的数学模型对轮胎垂向载荷进行估计,进而得到整车质量.经多工况下的实车测试验证,整车质量估计误差均小于4％.结果表明:文中方法对整车质量的估计具有较好的精度.

In order to achieve closed-loop accurate control of the electronic control air processing system of commercial vehicles,so that the safety and economy of the system can be improved,the temperature and humidity sensor is introduced into the air processing system of commercial vehicles.Together with the datas of the temperature and humidity and pressure,the high pressure dew point depress(DPD)can be real-time calculated and monitored using the Vogel-Tamma-Fullcher(VTF)equation.On this basis,a electronic control system for commercial vehicle air processing unit(APU)is designed,which is suitable for chassis domain controller or vehicle controller.Experimental results indicate that the system can effectively reduce the regeneration rate by about 4%,and the air compressor on-load rate of the commercial vehicle air processing system can be reduced by about 3%,under the China world transient vehicle cycle(C-WTVC).The dew point estimation is introduced into APU electrical control system,which realized real-time monitoring and stable control of DPD in air processing system,improved system safety and reduced the load of air compressor.

Class E power amplifying circuit has been studied systematically. By selecting appropriate devices, efficient and simple amplifying circuit has been designed. PID algorithm is proposed tentatively, and RF power generator based on class E power amplifier has been constructed. The experiments studies have indicated that the RF power generator has semi 3U size, its rated power is 1500-watt, AC to RF efficiency is over 65％, and power accuracy is less than 1％.

射频功率发生器是半导体工艺设备的核心部件,功率检测装置的性能决定了射频功率发生器的功率输出特性.系统地研究了射频功率检测装置,通过选择适当的器件,设计出简单精确的射频功率检测电路:经试验分析,本射频功率检测装置的功率检测范围0～1 500 W,对应的检测输出电压范围0.2～4.65 V,该检测输出电压与实际输出功率基本呈线性关系.

More requirements has been put forward to RF power generator. RF generator adopts class D power amplification mode. The driving circuit and power amplifier circuit are emphatically analyzed.Using four MOSFET formed a push pull circuit. Power combining is done by transmission line transformer. Its output power reaches 1500 W and the efficiency of the whole machine is over 65％.

Hedges are widely used and have significant pragmatic value. Studies of Hedges/hedging from linguistic perspectives have covered the fields of semantics, pragmatics, second language acquisition, translation and texture, etc. This paper, based on the theories of modality and interpersonal functions in systemic function linguistics, analyzes the interpersonal functions of hedges such as portraying characters’ personality, reflecting character relationships, indicating speakers’ emotion and author’s attitude as well as conveying author’s attention in literary works Far from the Madding Crowed.

The design of RF impedance matching device in the atomic layer deposition(ALD) system is described.The impedance matching network was simulated with ADS.Through analyzing the load impedance characteristic before and after the plasma generating in the vacuum chamber,and combining with the simulation results,the control method of impedance matching network when the plasma produce is proposed.The experiment proves that impedance matching can be realized by this impedance matching device and the control method.

In order to develop forging process of tiny-automobile crankshaft,both the pieces and dies of pre-forge and finish-forge have been designed with analysis of its forming feasibility and difficulty.A web with thickness 15mm has been designed between two balancing weights and a resistance wall structure has been designed on pre-forge and finish-forge dies.The two improvements have ensured the forming quality of finish-forge piece.The improved process has been simulated on the basis of FEM software DEFORM-3D.The simulation results validate process scheme.The simulation forecast pre-forge and finish-forge loads as 39.9MN,56MN,which shows that the press 63MN is affluent. The simulation reveals that the balancing weights of finish-forge piece have been filled fully. The trial-manufacture has been carried out on the basis of the validated process and designed dies,which shows that the dimensions and property of forging product reach designing orders.

Link Ring is the key part of coal mine well, so it is requested to have a very high anti pull and anti-fatigue function Many defects usually appeared in the original forming process, such as enfold and short of materialSo in this paper we uses DEFORM 3D FEM simulation and analysis system, establishes the rigid plasticity finite element model of 722 link ring hot forming processThen its forming process is simulated and analyzed by 3D FEM and the defects are predictedThe original forming process is improved and optimized as there some defectsThrough the simulating, we found that the material flows furiously in the original process of flat bottomed storage, so it is easy to result enfold and short of material condition Based on the simulating results, an improved die is designed to avoid the enfold effectively and can get the qualified forging At the same time, it lowers the depletion of the material, increases the utilization ratio of materialand also because the periphery of the connect skin is thin, it is easy to be resected, so the life time of the die is increased

使用塑性有限元分析软件Deform对6400转向节臂成形过程进行了模拟分析,找出了其在生产过程中出现的折叠、缺肉等问题的原因.通过Deform强大的处理程序对模拟结果进行分析,为解决问题提供了理论依据.

使用塑性有限元分析软件DEFORM对扭杆座成形过程进行了模拟分析,找出了其在生产过程中出现的筋部充不满等问题的原因.通过DEFORM强大的后处理程序对模拟结果进行分析,为解决问题提供了理论依据.