Intel 22FFL is a unique FinFET process technology optimized for RF and mmWave applications supporting superior RF performance to planar technologies with both f t and f max of NMOS above 300 GHz and 450 GHz respectively. Flicker noise improvement over planar technologies and excellent gain-power efficiency enabling low-power wireless applications are demonstrated.

This paper describes the transistor reliability of Intel's 22FFL FinFET technology, which includes an extensive variety of device offerings to enable high performance and low power design options. Detailed evaluations of BTI, TDDB, self-heating, and HCI are included to demonstrate the impact from the various device's pitch, channel length, and threshold voltage. Process integration details are included to highlight the interaction with reliability mechanisms. In addition, modeling results are shown to be well matched to silicon on both discrete devices and benchmark circuits.

A FinFET technology named 22FFL has been developed that combines high-performance, ultra-low power logic and RF transistors as well as single-pattern backend flow for the first time. High performance transistors exhibit 57%/87% higher NMOS/PMOS drive current compared to the previously reported 22nm technology [1]. New ultra-low power logic devices are introduced that reduce bit cell leakage by 28x compared to a regular SRAM cell enabling a new 6T low-leakage SRAM with bit cell leakage of sub 1pA/cell. An RF device with optimized layout has been developed and shows excellent f T /f MAX of (230GHz/284GHz) and (238GHz/242GHz) for NMOS and PMOS respectively.

A leading edge 14 nm SoC platform technology based upon the 2 nd generation Tri-Gate transistor technology [5] has been optimized for density, low power and wide dynamic range. 70 nm gate pitch, 52 nm metal pitch and 0.0499 um 2 HDC SRAM cells are the most aggressive design rules reported for 14/16 nm node SoC process to achieve Moore's Law 2x density scaling over 22 nm node. High performance NMOS/PMOS drive currents of 1.3/1.2 mA/um, respectively, have been achieved at 0.7 V and 100 nA/um off-state leakage, 37%/50% improvement over 22 nm node. Ultra-low power NMOS/PMOS drives are 0.50/0.32 mA/um at 0.7 V and 15pA/um Ioff. This technology also deploys high voltage I/O transistors to support up to 3.3 V I/O. A full suite of analog, mixed-signal and RF features are also supported.

Transistor reliability characterization studies are reported for a state of the art 22nm 3-D tri-gate HK/MG SoC technology with logic and HV I/O transistor architecture. TDDB, BTI and HCI degradation modes for logic and I/O transistors are studied and excellent reliability is demonstrated. In order to simultaneously integrate logic and HV 3-D tri-gate transistors with robust reliability, the importance of process optimization is emphasized.

A leading edge 22nm 3-D tri-gate transistor technology has been optimized for low power SoC products for the first time. Low standby power and high voltage transistors exploiting the superior short channel control, < 65mV/dec subthreshold slope and <40mV DIBL, of the Tri-Gate architecture have been fabricated concurrently with high speed logic transistors in a single SoC chip to achieve industry leading drive currents at record low leakage levels. NMOS/PMOS Idsat=0.41/0.37mA/um at 30pA/um Ioff, 0.75V, were used to build a low standby power 380Mb SRAM capable of operating at 2.6GHz with 10pA/cell standby leakages. This technology offers mix-and-match flexibility of transistor types, high-density interconnect stacks, and RF/mixed-signal features for leadership in mobile, handheld, wireless and embedded SoC products.

Extensive reliability characterization of a state of the art 32nm strained HK/MG SoC technology with triple transistor architecture is presented here. BTI, HCI and TDDB degradation modes on the Logic and I/O (1.2V, 1.8V and 3.3V tolerant) transistors are studied and excellent reliability is demonstrated. Importance of process optimizations to integrate robust I/O transistors without degrading performance and reliability of Logic transistors emphasized. Finally, Intrinsic and defect reliability monitoring for HVM are addressed.

A 32nm RF SOC technology is developed with high-k/metal-gate triple-transistor architecture simultaneously offering devices with high performance and very low leakage to address advanced RF/mobile communications markets. A high performance NMOS achieves an f(T) of 420GHz. Concurrently, a low leakage 30pA/um NMOS achieves an fT of 218GHz. Deep-nwell/guard rings improves noise isolation by >50dB. High Q inductors, >7V breakdown voltage power amplifier transistors, varactors, and precision passives are also presented.

A leading edge 32 nm high-k/metal gate transistor technology has been optimized for SoC platform applications that span a wide range of power, performance, and feature space. This technology has been developed to be modular, offering mix-and-match transistors, interconnects, RF/analog passive elements, embedded memory, and noise mitigation options. The low gate leakage of the high-k gate dielectric enables the triple transistor architecture to support ultra low power, high performance, and high voltage tolerant I/O devices concurrently. Embedded memories include high density (0.148 um2) and low voltage (0.171 um2) SRAMs as well as secure OTP fuses. Analog/RF SoC features include high precision, high quality passives (resistors, capacitors and inductors) and deep-nwell noise isolation.