Ling-Wu Yang

Technology Development Center, Macronix International Co., Ltd., Park, Hsinchu 300, Taiwan, ROC

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Papers64 papers

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Improvement of cell reliability by floating gate implantation on 1Xnm NAND flash memory

Jeng-Hwa Liao, Zong-Jie Ko, Yu-Min Lin,Hsing-Ju Lin,Jung-Yu Hsieh,Ling-Wu Yang,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu

Solid-state Electronics, (2018): 39-43

Bibtex

Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition

Pei-Ci Jhang,C. Y. Lu, Jung-Yu Shieh,Ling-Wu Yang,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu

Solid-state Electronics, (2017): 10-16

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The new methodology of contact process window vericification

Yilung Fang, Siaoling Li,Hsiangchou Liao,Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen

(2015)

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Traditional Chinese medical comprehensive therapy for cancer-related fatigue

Lingwu Yang, Tao Tao Li, Y T Chu,Kuangchao Chen, S D Tian, X Y Chen,G W Yang

Chinese Journal of Integrative Medicine, (2015)

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Inspection sensitivity improvement by wafer sort failure sites matching algorithm — Chimin Chen

Yiting Kuo,Hsiangchou Liao,Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen

(2015)

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Advanced high accuracy scanning electron microscopy review methodology by virtual defect — Yiting Kuo

Yilung Fang,Hsiangchou Liao,Lingwu Yang,Tahone Yang,Kuangchao Chen

(2015)

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Memory and manufacturing method thereof

Erhkun Lai,Yenhao Shih,Lingwu Yang, Chunmin Cheng

(2015)

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A study of surface condensation defect improvement after cryogenic implantation

Yumin Lin,Jungyi Guo,Jenghwa Liao,Hsinju Lin,Jungyu Hsieh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

Ion Implantation Technology, pp.1-4, (2014)

EIWOSBibtex

Advanced process control of effective field height in a single wafer spin cleaning tool

Wenming Chang,Chunling Chiang,Chunming Cheng,Jungyu Hsieh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

e-Manufacturing and Design Collaboration Symposium, pp.1-4, (2014)

EIWOSBibtex

Study on the improved thermal stability of cobalt silicide film by using cryogenic carbon PAI

Jungyi Guo,Jenghwa Liao,Yumin Lin,Chunmin Cheng,Jungyu Hsieh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

Ion Implantation Technology, pp.1-3, (2014)

EIWOSBibtex

FOUP mini-environment contaminants analysis in semiconductor manufacturing

Yiting Kuo,Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

e-Manufacturing and Design Collaboration Symposium, pp.1-3, (2014)

EIWOSBibtex

3D interconnect simulation applied to CMP thickness variations

Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu, Shihao Huang, Kevin Lin, Shanchung Lee, Donghua Liu, Rong Lv,Chingyun Hsiang, Chenmin Hu

(2014)

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Investigation of floating gate depletion effect on NAND FLASH reliability

Jenghwa Liao,Jungyi Guo,Yumin Lin,Jungyu Hsieh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

Ion Implantation Technology, pp.1-4, (2014)

EIWOSBibtex

3D interconnect simulation applied to CMP thickness variations

Ling-Wu Yang,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu

e-Manufacturing and Design Collaboration Symposium, pp.1-3, (2014)

EIWOSBibtex

FOUP Mini-Environment Contaminants Analysis in Semiconductor Manufacturing -Yiting Kuo

Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

(2014)

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FOUP N 2 purge engineering in Fab

Yiting Kuo,Howard Tsao,Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

(2013)

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Quasi-blind voltage contrast in e beam inspection

Hsiangchou Liao,Hsiaoleng Li,Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

(2013)

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Study of charge trapping characteristics of SONOS with various trapping layers using gate-sensing and channel-sensing (GSCS) method

Jenghwa Liao,Hsingju Lin,Hangting Lue,Peiying Du,Jungyu Hsieh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu

Solid-state Electronics, (2013)

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Detecting buried voids in copper interconnect

Hsiangchou Liao,Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu, Steve Lin, Alex Cheng, Ivan Yao,Siyeul Yoon, O Moreau, Hong Xiao

e-Manufacturing & Design Collaboration Symposium, pp.1-4, (2013)

Cited by2EIWOSBibtex

Inspection flow of yield impacting systematic defects

Chimin Chen, Chenghua Yang,Hsiangchou Liao,Tuung Luoh,Lingwu Yang,Tahone Yang,Kuangchao Chen,Chihyuan Lu, Donghua Liu, Jeff Fan, Rong Lv

(2013)

Cited by3Bibtex

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Papers64 papers

Ling-Wu Yang